Abstract: A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.

Abstract: A method for making a polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a polymer mixture. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has gelled. The rotating of the cylinder may be continued until the polymer has cured. The method may include forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymer mixtures. A system for manufacturing a polishing pad includes a centrifugal caster adapted to rotate. A polishing pad made by a method is provided.

Abstract: A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.

Abstract: A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.

Abstract: One aspect of the present invention includes an apparatus for scrubbing substrates such as a roller scrubber. According to one embodiment, the apparatus comprises a scrubbing medium having an axial bore and a mandrel having a section disposed through the axial bore of the scrubbing medium. The mandrel is configured so that it exerts an adjustable axial compression on the scrubbing medium. According to another embodiment, the apparatus comprises a roller scrubber. The roller scrubber comprises a scrubbing medium comprising a plurality of discrete disks having a center hole. The disks are disposed side by side so that the center holes form an axial bore in the scrubbing medium. The combined outer edges of the plurality of disks form a scrubbing surface of the roller scrubber.

Abstract: Pads and methods of making the pads for applications such as polishing substrates and chemical mechanical planarization of substrates are provided. The pads include a substantially smooth surface for improved performance.