Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.
Type:
Grant
Filed:
July 20, 2018
Date of Patent:
February 1, 2022
Assignee:
Tiptek, LLC
Inventors:
Joseph W. Lyding, Gregory S. Girolami, Scott P. Lockledge, Jinju Lee
Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.
Type:
Grant
Filed:
August 9, 2017
Date of Patent:
November 9, 2021
Assignee:
Tiptek, LLC
Inventors:
Joseph W. Lyding, Gregory S. Girolami, Scott P. Lockledge, Jinju Lee
Abstract: Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.
Type:
Grant
Filed:
August 12, 2016
Date of Patent:
August 28, 2018
Assignee:
Tiptek, LLC
Inventors:
Joseph W. Lyding, Gregory S. Girolami, Scott P. Lockledge, Jinju Lee