Abstract: Apparatus and methods to reduce unwanted motion in a payload of a precision instrument are described. The payload may be supported by an intermediate mass. A feedback signal based upon sensed motion of the intermediate mass may be applied to an intermediate-mass actuator arranged to drive the intermediate mass. Additionally, a feedforward signal may be applied to a payload actuator arranged to drive the payload and used to suppress unwanted motion of the payload. The feedforward signal may be derived from a source within the apparatus or external to the apparatus that would otherwise cause unwanted motion of the payload.
Type:
Application
Filed:
September 30, 2015
Publication date:
March 31, 2016
Applicant:
TMC - Ametek
Inventors:
Emil Kramer, Antonio Lopes, Justin Nealey