Abstract: A particulate contamination measurement method and apparatus are discussed. The method, for example, comprises pressing a measurement surface (5) of a polyurethane elastomer (2) against a surface (7) to be 2 measured, removing the polyurethane elastomer from the surface without leaving residues, then using an optical apparatus (11) to detect particles (8) which have been removed by the polyurethane elastomer from the surface and which have become attached to the polyurethane elastomer.
Type:
Application
Filed:
March 28, 2013
Publication date:
February 26, 2015
Applicants:
ASML Netherlands B.V., TNO
Inventors:
Antonius Martinus Cornelis Petrus De Jong, Jacques Cor Johan Van Der Donck
Abstract: A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including directing a beam of radiation at the surface of the flexible substrate; and detecting changes in intensity distribution, or angle of reflection, of the beam of radiation after the beam of radiation has been reflected from the surface of the substrate to obtain information indicative of the topography of the surface of the flexible substrate.
Type:
Application
Filed:
November 3, 2008
Publication date:
November 8, 2012
Applicants:
TNO, ASML Netherlands B.V.
Inventors:
Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Peter Theodorus Maria Giesen, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders, Mária Péter
Abstract: A system is described for managing service interactions in a combined service. The system comprises a first service delivery means for providing a first service, a second service delivery means for providing a second service, a combined service delivery means for providing a combined service capable of associating the first service to one of the second service. The combined service is implemented using a combined state model, which comprises a predetermined number of combined states formed on the basis of the states of the first and the second service and armed detection points for detecting predetermined transitions between the combined states. The combined service delivery means further comprises a combined state manager adapted to transmit a control signal to the first and/or the second service delivery means for inducing a predetermined state transition in the respective first and/or the second service in response to the activation of an armed detection point.
Type:
Application
Filed:
October 20, 2008
Publication date:
September 9, 2010
Applicants:
KONINKLIJKE KPN N.V., TNO
Inventors:
Hans Maarten Stokking, Fabian Arthur Walraven, Mattijs Oskar Van Deventer, Omar Aziz Niamut