Patents Assigned to Toktyo Electron Limited
  • Patent number: 7284560
    Abstract: A liquid processing apparatus has a substrate rotating device including a holder for holding a substrate and a motor, a chamber for applying the liquid processing to the substrate, a posture changing mechanism for changing the posture of the substrate rotating device at outside of the chamber such that a state of the substrate held by the holder changes between vertical and horizontal, and a position adjusting mechanism for relatively adjusting the positions of the chamber and the substrate rotating device together with the posture changing mechanism such that the holder is housed in the chamber. The substrate is taken out from the container and held by the holder in a horizontal state. After the posture of the holder was changed to vertical, a process liquid is supplied to the substrate of vertical state.
    Type: Grant
    Filed: May 24, 2004
    Date of Patent: October 23, 2007
    Assignee: Toktyo Electron Limited
    Inventor: Yuji Kamikawa