Patents Assigned to Tokuyama Toshiba Ceramics Co., Ltd.
  • Patent number: 7276125
    Abstract: The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plate 5 of a susceptor main body 2 having the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each partition being provided with a wafer mounting concave portion 6a, 6b, 6c on which a wafer is laid, and the inclination angle ?a, ?b, ?c of a bottom face 6a1, 6b1, 6c1 of the concave portion for each partition to the vertical line is gradually decreased in each partition from the upper part to the lower part.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: October 2, 2007
    Assignees: Toshiba Ceramics Co., Ltd., Tokuyama Toshiba Ceramics Co., Ltd.
    Inventors: Toshikazu Miyamoto, Tadashi Ohashi