Abstract: A probing apparatus includes a mechanism apparatus. The mechanism apparatus includes a base body, a vibration absorber, a shifting mechanism, and a stage connected via the base body to a ground terminal. A probe, positioned over the stage, is connected to a measurement terminal of a measuring apparatus via a signal cable. The signal cable has a connecting terminal connected to the measurement terminal of the measuring apparatus. A shielding cover, positioned over a measured device on a glass substrate held on the stage, has an area not smaller than an area of the measured device and not greater than four times the area of the measured device. The shielding cover is grounded.

Abstract: A probe (20) for a probe card that has a multi-layered structure, in which a probe shaft (22) is enclosed by a covering layer (24). The probe shaft (22) is made of conductive metal, and provided with a contact portion (22a) at a tip end for pressing onto a test body to measure electric connection of the test body. The contact portion (22a) is formed having a constant diameter, and retains the constant diameter even after being machined for reuse. The covering layer (24) is made of a material having a high Young's modulus to help counter stresses repeatedly applied to the probe shaft (22), and formed covering the entire external circumferential surface of the probe shaft (22) except for the contact portion (22a). The tip end of the covering layer (24) is tapered in order to deal with a test body with narrower pitches.

Abstract: A detecting electrode disposed at a position opposed to an article to be conveyed and an auxiliary electrode shielded from an external electric field are connected to a field effect transistor through switch means. When the article to be conveyed passes the front of the detecting electrode, charge is induced at the detecting electrode, the gate electric field of the field effect transistor is varied according to the quantity of charge to produce an output responsive to the quantity of charge. When the switch means is switched to the auxiliary electrode, a zero potential is detected. Therefore, the charged potential of the article to be conveyed can be accurately measured.