Abstract: An abrasive and a dispersion medium are introduced into a dispersing machine to uniformly disperse the abrasive. The liquid to be processed after dispersion is centrifugally classified by a centrifugal classifier to remove heavy particles which will cause scratches. Chemicals are added to the liquid to be processed after classification to make adjustments on a variety of properties such as the concentration, pH, and the like. The polishing slurry after adjustment for a desired composition is filtered by a filter to remove debris therefrom. The filter may have a mesh size large enough to allow particles of the abrasive to pass therethrough.

Abstract: This invention relates to a chemical mechanical polishing slurry comprising polishing grains, ammonium nitrate as an oxidizing agent, 1,2,4-triazole as a polishing promoter for a copper metal film and water and having a pH within a range of 3 to 4. The polishing slurry is suitable for forming a damascene copper-based metal interconnection comprising a tantalumr-based metal as a barrier metal film material.

Abstract: A reversible information liquid crystal display medium is disclosed which is capable of long term information display, even through extremes of heat and pressure, without the addition of energy to maintain the display. A primary ingredient of the liquid crystal display medium is a liquid crystalline composition of high-molecular liquid crystal in which molecules that can function as a liquid crystal are chemically bound to side chains of a high-molecular polymer skeleton through a flexing group. Low-molecular liquid crystal may be added to the liquid crystalline composition in order to reduce the response speed of the liquid crystalline composition. The liquid crystal display medium may be used in the display portion of a contactless integrated circuit (IC) card.

Abstract: The present invention relates to a slurry for chemical mechanical polishing, which contains a silica polishing material, an oxidizing agent, a benzotriazole-based compound, a diketone and water.

Abstract: A slurry for polishing copper-based metal containing a silica polishing material, an oxidizing agent, an amino acid, a triazole-based compound and water, wherein a content ratio of amino acid to triazole-based compound (amino acid/triazole-based compound (weight ratio)) is 5 to 8.

Abstract: By using a polishing slurry which contains, at least, a polishing grain, an oxidizing agent and a basic amino acid compound, it is possible to suppress dishing and erosion liable to be produced in chemical mechanical polishing (CMP) for a copper-based metal film when forming a buried interconnection of a copper-based metal on a barrier metal film of a tantalum-based metal.

Abstract: This invention provides a chemical mechanical polishing slurry for polishing a copper-based metal film formed on an insulating film comprising a concave on a substrate, comprising a polishing material, an oxidizing agent and water as well as a benzotriazole compound and a triazole compound. The polishing slurry may be used in CMP to form a reliable damascene electric connection with excellent electric properties at a higher polishing rate, i.e., a higher throughput while preventing dishing.

Abstract: This invention provides a chemical mechanical polishing slurry for polishing a metal film formed on an insulating film with a concave on a substrate wherein the slurry contains a thickener without an ionic group with an opposite sign to a charge on a polishing material surface to 0.001 wt % or more and less than 0.05 wt % to the total amount of the slurry and has a slurry viscosity of 1 mPa·s to 5 mPa·s both inclusive. The polishing slurry may be used in CMP to form a reliable damascene electric connection with excellent electric properties at a higher polishing rate, i.e., a higher throughput while preventing dishing or erosion.

Abstract: The present invention relates to a lapping oil composition which is advantageously used in finish-grinding of a material to provide a high-quality grinding surface, without selective grinding, which is generally caused during lapping and polishing processes of the composite material. The lapping oil composition contains at least one acetylene glycol compound and preferably further contains at least one at least one phosphoric ester compound.

Abstract: By using a polishing slurry which comprises, at least, a polishing grain, an oxidizing agent and a higher-mono-primary amine, it is possible to suppress dishing and erosion liable to be produced in chemical mechanical polishing (CMP) for a copper-based metal film when forming a buried interconnection of a copper-based metal on a barrier metal film of a tantalum-based metal.

Abstract: This invention relates to free abrasive slurries suited for use in polishing workpieces composed of materials varying in hardness, uniformly without selective polishing or working without difference in the amounts of polishing for different materials. The subject matter of this invention is a free abrasive slurry composition for polishing workpieces in which at least one soft material with a Vickers hardness in the range of 26 to 360 and at least one hard material with a Vickers hardness in the range of 700 to 4000 are mixedly present, comprising a polyol with a molecular weight ranging from 300 to 20000, a polishing powder, a dispersion medium, and optionally a surfactant.

Abstract: The present invention relates to a free abrasive slurry composition which is advantageously used in uniform grinding of a composite material composed of a plurality of materials each having different hardness, without causing selective grinding. The free abrasive slurry composition contains abrasive particles, an anti-abrasion agent as an anti-selective grinding agent and a dispersion medium and the anti-abrasive agent is a compound containing one or both of sulfur and phosphorus or hydroxyl group(s) in the molecular chain.

Abstract: The invention is a magnetic recording medium which is effectively protected against forgery by the alteration of recorded data, and a method for carrying out writing and reading on this magnetic recording medium. The magnetic recording medium of the invention comprises a recording material composed of a crystalline alloy containing Fe and Al . In the recoding material, the total amount of Fe and Al is at least 90 at % and the atomic ratio Al/(Fe+Al) ranges from 0.30 to 0.45. The recording material changes from a disordered phase to an ordered phase by heating. The recording material has a saturation magnetization of at least 45 emu/g prior to heating and lowers its saturation magnetization by at least 35 emu/g upon heating. Dark regions are observable in a bright-field image of the recording material by transmission electron microscopy, the dark regions accounting for 15-60% of the recording material in areal ratio and having a maximum breadth of 10-200 nm.

Abstract: A method of inputting print-destined data in rewritable card read/write apparatuses of a card utilization system very conveniently. A message edited by a computer (20) for rewritable card users is stored in a memory (23) provided in association with a magnetic head energizing means (21; 5) of a rewritable card read/write apparatus by way of an external-input interface (6). A magnetic card having at least one magnetic track for storing the message is inserted in the above-mentioned rewritable card read/write apparatus to thereby create a message card carrying the message from the magnetic card.

Abstract: A magnetic recording medium, and methods of making and reading the same, including on at least a portion of a substrate an irreversible recording layer which contains an irreversible recording material undergoing an irreversible change of saturation magnetization upon heating. The invention involves the steps of previously heating the irreversible recording layer to form an initial heated region in which a plurality of heated bars whose saturation magnetization has been irreversibly changed are arrayed in a bar code pattern, and converting unheated bars disposed between the heated bars into a heated state for changing the array pattern of heated bars, thereby recording the information.

Abstract: In a rewritable card read/write apparatus including a printing thermal head (11) for printing data thermally and a transporting mechanism for feeding a rewritable card (19) forwardly and backwardly so that the rewritable card (19) can pass by the thermal head (11), a method which allows the printed data to be erased within a short time with the thermal head (11) itself. A columnwise printed data erasing range (18) of a printed data area is designated for the card (19) inserted into the apparatus. The thermal head (11) is electrically energized successively at least in two serial cycles by changing over electric energy level at least from a first electric energy level in a first cycle to a second electric energy level in a second cycle.

Abstract: A magnetic recording medium, and a method of making the same, including an irreversible recording layer which undergoes an irreversible change of saturation magnetization upon heating. The magnetic recording medium includes on at least a portion of a substrate an irreversible recording layer which contains an irreversible recording material undergoing an irreversible change of saturation magnetization upon heating. The irreversible recording layer includes at least in part a fixed information recording region for recording the fixed information of the medium. In the fixed information recording region, a plurality of heated bars whose saturation magnetization has been irreversibly changed are arrayed substantially parallel to each other. The array pattern of the heated bars or the array pattern of unheated bars disposed between adjacent ones of the heated bars contains the fixed information encoded in a frequency modulation process or phase modulation process.

Abstract: A fixed permanent pattern is used for identifying a magnetic recording medium and a high security against forgery or modification is obtained by a magnetic recording medium including a non-magnetic support and at least two magnetic layers formed on said support, characterized in that at least one of said at least two magnetic layers contains magnetic particles having a coercive force of 4,000 Oe or less dispersed in a binder and has a non-rewritable fixed signal which has been recorded by magnetic field generated by a signal recorded on one or more other magnetic layers under the influence of an orientation magnetic field.

Abstract: An abrasive tool comprises a base and an abrasive powder bonded to the base in the form of a single-layer structure in which the particles do not substantially overlap or rest one upon another. For the bonding purpose the abrasive powder is either dispersed in a dilute solution of a binder resin and a solvent for subsequent application of the solution to the base or is spread over and fixed to a binder resin coat formed beforehand on the base.

Abstract: A composite spherical-particle abrasive comprises spherical particles and abrasive particles, each spherical particle being coated with a plurality of abrasive particles. The composite abrasive particles are dispersed in a binder resin, and the dispersion is applied as an abrasive layer or coat to a backing to provide an abrasive tool. A grinding method uses such a composite spherical-particle abrasive tool.