Abstract: Components of sampled gases are analyzed by a Fourier transform infrared spectrophotometer 28. It is determined whether or not the analyzed gases include at least one kind of specific gases equal to or more than a predetermined quantity. In a case where mixed gases include at least one kind of the specific gases equal to or more than the predetermined quantity, a controller 30 supplies an operation display monitor 31 with a signal indicating leakage of the kind of the specific gases. Hence, it is possible to realize detection by kind of the gases with high accuracy irrespective of the kind of leaked gas.
Type:
Grant
Filed:
February 23, 2001
Date of Patent:
May 31, 2005
Assignees:
Tokyo Electron Limited, Tomoe Shokai Co., Ltd.
Abstract: The unwanted or unreacted decaborane gas that results from a boronizing operation using decaborane which is solid at ordinary temperatures but which is heated to a gaseous phase for injection into a vacuum vessel is passed through a metal tube packed with the granules of an alkaline oxidizing agent consisting of potassium permanganate and potassium hydroxide, whereby the decaborane gas is oxidized to solid and gaseous stable substances including manganese compounds and hydrogen. This provides an effective method for removing boron from the boron-containing exhaust gases that result from the coating of the inner surfaces of vacuum vessels in nuclear fusion reactors with an evaporated boron film.
Type:
Grant
Filed:
January 24, 1996
Date of Patent:
September 30, 1997
Assignees:
Japan Atomic Energy Research Institute, Tomoe Shokai Co., Ltd.