Abstract: A temperature control unit includes: a substantially flat-plate-shaped placement section (10) configured to support a heat transfer target; a heating section (20) configured to heat a heat transfer target placed on the placement section (10); and a heat transfer section (30) disposed in contact with at least one of the placement section (10) and the heating section (20), the heat transfer section (30) being at least partially formed of a metal porous structure.

Abstract: An electrostatic chuck device containing a substrate, a stack stacked on an upper surface of the substrate in the thickness direction, and a ceramic layer stacked on an upper surface of the stack in the thickness direction. A sleeve formed from an insulating material is inserted into a through-hole that penetrates through the substrate and the stack in the thickness direction. The upper surface of the sleeve in the thickness direction has a two-level structure including a first upper surface positioned on the same plane as an upper surface of the substrate in the thickness direction, and a second upper surface positioned above the first upper surface in the thickness direction of the sleeve and disposed proximate to the ceramic layer. In a plan view, an edge portion of the stack is disposed on top of the first upper surface.

Abstract: An electrostatic chuck device is provided in which the occurrence of cracking in a ceramic layer, the cracking being caused by a difference in thermal expansion between a substrate and a sleeve due to heat generated during formation of the ceramic layer, is suppressed. The electrostatic chuck device includes a substrate, a laminated body that is laminated on the substrate and that includes at least an internal electrode, and a ceramic layer that is laminated on the upper surface of the laminated body in the thickness direction. The electrostatic chuck device is such that the substrate has a through-hole provided so as to pass through in the thickness direction, a sleeve formed from an insulating material is inserted into the through-hole, and the sleeve is joined to the through-hole via a joining means at an upper portion of the substrate in the thickness direction.

Abstract: With an objective of obtaining a temperature control unit capable of highly uniform temperature control, provided is a temperature control unit (1) having a heat transfer medium introduction port (2) configured to introduce a heat transfer medium from outside, a temperature control mechanism (3) through which the heat transfer medium from the heat transfer medium introduction port (2) passes, and a heat transfer medium discharge port (4) configured to discharge the heat transfer medium from the temperature control mechanism (3) to outside, wherein: the temperature control mechanism (3) is provided with a porous metal body and a housing (5) configured to house the porous metal body; at least one main surface of the housing (5) is exposed to an outer side of the temperature control mechanism (3), and an inner side of the main surface contacts the porous metal body, thereby exchanging heat between the porous metal body and outside; and a heat transfer medium dispersion area (10) is provided between the heat tran

Abstract: To provide an electrode for an electricity storage device, which electrode employs a porous conductor having conductive nanostructures formed on its surface and makes it possible to provide a less expensive electricity storage device having a high discharge capacity and high charge/discharge cycle resistance. A porous conductor which is used as an electrode for an electricity storage device has a plurality of conductive nanostructures on a surface of the porous conductor.