Abstract: A laser interferometer (10) comprises: a first beam splitter (22) which splits a laser beam emitted from a light source (3) into a first beam (L2) and a second beam; a second beam splitter (24) which splits the second beam into a third beam (L1) and a fourth beam (L3), and which causes reflected beams, produced by reflection of the split beams (L1, L3) and incident from reverse directions to the directions of the split beams, to exit in a reverse direction to the direction of the second beam; and a beam selecting unit (50, 51, 60, 66, 68) which, from among the reflected beams produced by reflection of the third and fourth beams (L1, L3) and caused to exit the second beam splitter (24) in the reverse direction to the direction of the second beam, selects a beam to be combined in the first beam splitter (22) with a reflected beam produced by reflection of the first beam (L2) and incident on the first beam splitter from a reverse direction to the direction of the first beam (L2).

Abstract: A dimension measuring device that has improved operability when an expensive display device, such as, a bar graph is used. The device includes plural dimension measuring sections and a display section for displaying dimension measurements generated by the plural dimension measuring sections, wherein the number of dimension measurements the display section can display simultaneously is less than the number of dimension measurements generated by the plural dimension measuring sections. The device also includes a display control section, which automatically selects a dimension measurement to display on the display section in accordance with the dimension measurements generated by the plural dimension measuring sections.

Abstract: The crisscross fulcrum according to the present invention is formed as a continuous member by fabricating one elastic member in the form of a plate. Therefore, the rocking fulcrum member can be obtained as a precise fulcrum member at a low cost with reduced variations in the spring characteristic and can be easily assembled. Additionally, in the present invention, it is preferable that a heat treatment should be performed on the crisscross spring formed by fabricating the one elastic member in the form of a plate. By the heat treatment performed after fabricating for forming the crisscross spring, the spring characteristic is improved.

Abstract: In a measuring apparatus, a plurality of design values in design values substituted in the correction computation equations for correcting a geometrical measurement error inherent in the measuring apparatus are set as variables, the variables are optimized by a numerical solution to obtain optimized correction computation equations. A measured value is computed by using the optimized correction computation equations obtained. For optimization of the variables, a master work is measured and the variables are adjusted so that a measurement error is minimized.

Abstract: The present invention provides the grinding wheel, the grinding apparatus and the grinding method of the present invention so that increase in the size of the grinding apparatus can be suppressed, and the back surface grinding of the wafer and the grinding of the peripheral edge part of the wafer are performed at the same time, whereby the peripheral edge part of the extremely thin wafer is prevented from being sharpened, and cracking and chipping of the wafer peripheral edge part can be prevented.

Abstract: The crisscross fulcrum according to the present invention is formed as a continuous member by fabricating one elastic member in the form of a plate. Therefore, the rocking fulcrum member can be obtained as a precise fulcrum member at a low cost with reduced variations in the spring characteristic and can be easily assembled. Additionally, in the present invention, it is preferable that a heat treatment should be performed on the crisscross spring formed by fabricating the one elastic member in the form of a plate. By the heat treatment performed after fabricating for forming the crisscross spring, the spring characteristic is improved.