Patents Assigned to TOSHIBA CERAMICS CO., LTD. & TOKYO ELECTRON LIMITED
  • Heater sealed with carbon wire heating element
    Publication number: 20020001460
    Abstract: The heater sealed with a carbon wire heating element of the present invention has a carbon wire heating element sealed within a quartz glass member, said carbon wire being prepared by knitting carbon single fibers into a knitted cord or a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and a crystallite size Lc (002) thereof being 4.0 nm or more.
    Type: Application
    Filed: May 25, 2001
    Publication date: January 3, 2002
    Applicant: TOSHIBA CERAMICS CO., LTD. & TOKYO ELECTRON LIMITED
    Inventors: Sunao Seko, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Hideyuki Yokoyama, Masakazu Kobayashi, Takanori Saito, Ken Nakao