Abstract: In a method of checking pattern, a pattern of a target is photographed and an image of the check pattern is converted into a check image data which is represented by pixel data and density data. A design data for forming the pattern of the target is also converted into a reference image data corresponding to the check image data. The check and reference image data is processed and converted into check and reference gradient vector data, respectively. The check gradient vector data is compared with the reference gradient vector data in a respective corresponding pheripheral pixel data, and its pheripheral pixel data so that the defect is detected.

Abstract: A high-accuracy traveling table apparatus comprises a workpiece fixing device and a laser mirror for position measurement provided on a table capable of traveling at least in the direction of one axis. The table comprises a mount to which the workpiece fixing device and the laser mirror are fixed and at least one partially coupling member for partially coupling the mount to the table so as to prevent transmission of a distortion of the table to the mount.

Abstract: A re-size circuit extracts the bit data of a pattern to be drawn, at a specific address and its adjacent addresses of a pattern to be drawn, from a bit map memory storing LSI pattern data. For the Data at the adjacent addresses, either "0" or "1" re-size parameter data is set according to the contents of the re-size directions. The thickness of the pattern is altered by means of the logical operation of the data at the adjacent addresses and the re-size parameter data.

Abstract: A method and apparatus controlling an injection molding machine having a compression process. The velocity is controlled using a closed loop single or multi-step programmed velocity control method or a closed loop multi-step programmed slope velocity control method. Pressure may be controlled using a multi-step programmed pressure control method in which a pressure signal is detected from a detector set in the mold die or set in the clamping cylinder. The method of the present invention improves the accuracy and density of articles molded.