Patents Assigned to Toshiba Memory Coporation
  • Patent number: 10566339
    Abstract: A semiconductor memory device includes a semiconductor substrate, a first insulating film provided above the semiconductor substrate, a first conductive film provided above the first insulating film, a plurality of first electrode films provided above the first conductive film and stacked to be separated from each other, a semiconductor member extending in a stacking direction of the plurality of first electrode films, and a charge storage member provided between the semiconductor member and one of the plurality of first electrode films. The first conductive film includes a main portion disposed at least below the plurality of first electrode films, and a fine line portion extending from the main portion toward an end surface side of the semiconductor substrate. A width of the fine line portion is narrower than a width of the main portion.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: February 18, 2020
    Assignee: Toshiba Memory Coporation
    Inventors: Kotaro Fujii, Jun Fujiki, Shinya Arai