Patents Assigned to Toshihiro Itoh
  • Inspection method and inspection apparatus
    Publication number: 20060192578
    Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
    Type: Application
    Filed: May 2, 2006
    Publication date: August 31, 2006
    Applicants: TOKYO ELECTON LIMITED, TADATOMO SUGA, TOSHIHIRO ITOH
    Inventors: Shinji Iino, Kiyoshi Takekoshi, Tadatomo Suga, Toshihiro Itoh, Kenichi Kataoka
  • Inspection method and inspection apparatus
    Publication number: 20040174177
    Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
    Type: Application
    Filed: March 18, 2004
    Publication date: September 9, 2004
    Applicants: TOKYO ELECTRON LIMITED, TADATOMO SUGA, TOSHIHIRO ITOH
    Inventors: Shinji Iino, Kiyoshi Takekoshi, Tadatomo Suga, Toshihiro Itoh, Kenichi Kataoka
  • Inspection method and inspection apparatus
    Patent number: 6777967
    Abstract: Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
    Type: Grant
    Filed: August 20, 2001
    Date of Patent: August 17, 2004
    Assignees: Tokyo Electron Limited, Tadatomo Suga, Toshihiro Itoh
    Inventors: Shinji Iino, Kiyoshi Takekoshi, Tadatomo Suga, Toshihiro Itoh, Kenichi Kataoka