Abstract: A multiple axes drive apparatus having a plurality of electrostatic actuators for applying driving forces in a plurality of different directions within a plane to a driven member. Each electrostatic actuator of the drive apparatus includes a first member that has a plurality of first electrode strips arranged in a single direction with a predetermined pitch, and a second member that has a plurality of second electrode strips arranged in the same direction as the first electrode strips with the same pitch. The members are located opposite to each other so one of the members moves along the single direction in response to a Coulomb force generated between the electrode strips when voltage is applied to the electrode strips.

Abstract: An electrostatic actuator comprising:a first member (1) having a plurality of belt-like electrodes (4) insulated from one another and disposed in a predetermined direction with predetermined gaps between them;a second member (10) constituted by a resistance body on the opposed surface thereof coming into contact with the surface of the first member (1); andcontrol means (11) capable of changing an impressed voltage to be applied to each of a plurality of belt-like electrodes disposed on the first member;the control means (11) being constituted so as to move the first and second members relative to each other by applying a predetermined voltage pattern consisting of a pulse voltage to the belt-like electrodes.

Abstract: An electrostatic actuator incorporates a sensor for detecting both position and the state of distribution of charges and is efficiently driven in high-speed operation. A first member has a plurality of driving electrodes thereon, each having the shape of a strip, a second member is placed in contact with the first member, and a control means is provided for changing the voltages applied to the driving electrodes to produce relative movement of the first member and the second member. Detecting electrodes are arranged on the first member at predetermined phases, independently of the driving electrodes, and a detecting unit detects the position of the second member and the state of charges induced on the second member, through the detection of electric signals induced in the detecting electrodes by the charges distributed on the second member.

Abstract: An electrostatic actuator using films providing a large force with a small and simple structure comprising a stator (1) providing a plurality of belt type electrodes wired in the insulation material, a migrator (10) placed on the stator (1) and composed of an insulation material layer film (11) and a resistance material layer film (12) and a means for floating, driving and positioning the migrator (10) by changing voltages to be applied to the belt type electrodes (4).

Abstract: A bearing unit comprising a rotating body, a rotating shaft and a bearing, wherein there is provided a construction with a plurality of electromagnetic poles is arranged, together with a plurality of sensors for detecting the run-out of the rotating shaft, and also comprises a control circuit for controlling the intensity of a magnetic force according to a detection output of these sensors, thereby controlling the bearing unit so that vibration and run-out of the rotating body due to inbalance thereof are effectively suppressed while making the unit to revolve around the principle axis of shape.