Abstract: Super clean air having therein chemical components—such as hydrocarbons, organic halogens, acidic gases, basic gases, aldehydes, nitrogen oxides, and H2O (that is, all components other than oxygen, nitrogen, and noble gases—the types of chemical components differ depending on the source of the air)—in concentrations no more than 1 ppb and a dew point lower than −40° C., is obtained from the atmosphere by low-temperature adsorption treatment in stages at temperatures ranging from −40° C. to −180° C. Material air collected from the atmosphere is pretreated in a room-temperature adsorption step to remove moisture and carbon dioxide. The pretreated air is then low-temperature adsorption treated by absorbents in a plurality of steps to adsorb the gaseous chemical components, the treatment temperature being lower in each succeeding step. Treatment at −40° C. may remove, for example, HF, SO2, and/or NH3. Treatment at −100° C.

Abstract: Real-time and accurate detection of the concentration of hydrogen peroxide vapor supplied into a treatment vessel is made possible by a method and apparatus that permits efficient and effective sterilization, disinfection, or the like with hydrogen peroxide vapor. The concentration of hydrogen peroxide vapor in a treatment vessel is detected by a semiconductor gas sensor in a treatment system where an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure fixed at a constant level.

Abstract: Super clean air suitable for use in a tunnel-type wafer transport system, etc., is produced efficiently with the specific energy consumption reduced and the yield improved by making good use of part of cooling energy and gas produced in a low temperature separation type nitrogen producing apparatus. Material air 1a collected from the atmosphere is pretreated in a room temperature adsorption tower 7, this pretreated air is adsorption treated at -60.degree. C. in a first low temperature adsorption tower 9, and the treated air 1c is further adsorption treated at -150.degree. C. in a second low temperature adsorption tower 10, thereby producing super clean air 1e containing not higher than 1 ppb of the chemical components other than nitrogen, oxygen and noble gases and having a dew point of not higher than -100.degree. C.

Abstract: A two-fluid cleaning jet nozzle has an atomizing unit provided with an atomizing tube in which a liquid is atomized by a pressurized gas into liquid droplets, and an accelerating unit provided with an accelerating tube which accelerates and jets the liquid droplets against the surface of a workpiece to remove dust particles adhering to the surface of the workpiece. The sectional area of the atomizing tube available for gas flow is greater than the sectional area of the accelerating tube available for flow of the gas and the liquid droplets. The accelerating tube has the shape of a straight cylindrical tube or a Laval nozzle.

Abstract: An apparatus for mounting a superconducting element includes a first chamber which accommodates a first coolant and maintains the superconducting element at a very low temperature, a second chamber which accommodates a second coolant and is thermally connected to the first chamber via a barrier member, the second coolant being liquidized at a temperature lower than that of the first coolant, and a cooling device which is connected to the second chamber and liquidizes the first coolant.

Abstract: The disclosure where the hydrogen peroxide vapor 4a is supplied to a treatment vessel, and a subject 1 to be treated in the treatment vessel 2 is subjected to a sterilization treatment by contact with the hydrogen peroxide vapor 4a, the concentration of the hydrogen peroxide vapor 4a in the treatment vessel 2 is detected directly and accurately on a real-time basis by a semiconductor gas sensor 8.

Abstract: The present invention provides a method for passing a flat polyimide film cable as a communication cable (signal line) to a specimen through the inner wall made of FRP material and the outer wall of the cryostat for cooling a specimen such as, for example, a semiconductor operated in cryogenic liquid such as liquefied helium, particularly a method for passing the cable through the inner wall and sealing it thereto. A slit is provided in advance in the inner wall and an FRP layer is formed in advance on both surfaces of the polyimide film cable along distance sufficiently larger than the thickness of the inner wall, then the polyimide film cable provided with the FRP layer is passed through the slit so that part of the FRP layer is positioned inside the slit and the surface of the FRP layer and the internal surface of the slit are bonded and sealed with the adhesive.

Abstract: An apparatus for disintegrating lumps of boiled rice while cooling and freezing, comprising a cooling chamber and a freezing chamber through which boiled rice is caused to pass being carried on a mesh conveyor and thereby being cooled and frozen to a temperature from +10.degree. C. to -30.degree. C., and one or plurality of disintegrators disposed above and across the belt conveyor each comprising a rotary comb and a stationary comb both having a plurality of comb teeth disposed such that the teeth of the opposing combs are meshed with each other. In a preferred embodiment, the stationary comb of the disintegrator at the downstream of the mesh belt conveyor is disposed spaced apart from the belt conveyor by such a gap between the lower end of the comb teeth and the upper surface of the belt conveyor as allowing to pass only the individually disintegrated rice grains to pass therethrough.

Abstract: A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with air in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere.An inert gas mixing pipe is connected for dilution to an exhaust gas feed section, an enclosure pipe is fitted to the outer circumference of an exhaust gas introduction pipe introduced into the combustion chamber to constitute a double pipe structure, and the enclosure pipe is connected at the rear end thereof to an inert gas feed pipe and slightly protuded at the top end thereof ahead of the top end for the exhaust gas introduction pipe.