Abstract: A halogenated organic compound is introduced into a plasma. In the plasma state, substances are very reactive and chemical substances which are not readily decomposed such as halogenated organic compounds are decomposed in a short time. Specifically, in a high-temperature plasma exceeding 10,000.degree. C., almost all molecules are considered to dissociate into atoms. A reactive substance such as water is introduced into a plasma together with a halogenated organic compound. The decomposed halogenated organic compound is caused to react with the reactive substance, for preventing the decomposed organic compound from returning to its original state.
Type:
Grant
Filed:
January 14, 1994
Date of Patent:
October 11, 1994
Assignees:
Agency of Industrical Science and Technology, Toyonobu Yoshida, JEOL Ltd.
Abstract: A halogenated organic compound is introduced into a plasma. In the plasma state, substances are very reactive and chemical substances which are not readily decomposed such as halogenated organic compounds are decomposed in a short time. Specifically, in a high-temperature plasma exceeding 10,000.degree. C., almost all molecules are considered to dissociate into atoms. A reactive substance such as water is introduced into a plasma together with a halogenated organic compound. The decomposed halogenated organic compound is caused to react with the reactive substance, for preventing the decomposed organic compound from returning to its original state.
Type:
Grant
Filed:
April 11, 1991
Date of Patent:
February 16, 1993
Assignees:
Agency of Industrial Science and Technology, Toyonobu Yoshida, JEOL Ltd.
Abstract: A halogenated organic compound is introduced into a plasma. In the plasma state, substances are very reactive and chemical substances which are not readily decomposed such as halogenated organic compounds are decomposed in a short time. Specifically, in a high-temperature plasma exceeding 10,000.degree. C., almost all molecules are considered to dissociate into atoms. A reactive substance such as water is introduced into a plasma together with a halogenated organic compound. The decomposed halogenated organic compound is caused to react with the reactive substance, for preventing the decomposed organic compound from returning to its original state.
Type:
Grant
Filed:
November 7, 1989
Date of Patent:
June 25, 1991
Assignees:
Agency of Industrial Science and Technology, Toyonobu Yoshida, JEOL Ltd.
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