Abstract: A trimmable microminiature force-sensitive switching device for detecting the state of external conditions, such as pressure, acceleration and temperature, is disclosed. The device includes a silicon substrate having a reduced-thickness, deflectable member adapted to change its deflection in response to changes in the external condition to be detected. Increasing deflection of the member establishes electrical contact between a common contact and first one, then progressively more, spaced electrical contacts of a plurality of switches. Each of the spaced electrical contacts is connected to a common terminal. Trimming of the switching device is accomplished by application of a preselected external force, such as pressure, that causes the deflection of the deflectable member and the closing of one or more of the switches.
Type:
Grant
Filed:
November 13, 1986
Date of Patent:
April 12, 1988
Assignee:
Transensory Device, Inc.
Inventors:
Henry V. Allen, John H. Jerman, Stephen C. Terry