Abstract: A gas recycling system includes a series of removal units configured to receive a flow of contaminated lasing gas and output a flow of purified neon gas, the units include a set of filters that remove fouling elements from the flow of contaminated lasing gas; a first set of parallel trap modules that remove hydrogen from the flow of contaminated lasing gas; and a second set of parallel trap modules that remove xenon from said flow of contaminated lasing gas; and a storage vessel that receives said flow of purified neon gas from at least one of the plurality of removal units.