Abstract: In one example, a fluid system is provided that includes an air-operated fluid pump, a control air system operably connected with the fluid pump, and a pump controller operably connected with one or more components of the control air system. The pump controller is configured to automatically control the operation of the air-operated fluid pump by way of the control air system. The fluid pump parameters automatically controlled by the pump controller can include a discharge flow rate of the fluid pump, a discharge pressure of the fluid pump, and/or a pulsation value associated with the discharge of the fluid pump.

Abstract: In one example, a valve includes a body defining a chamber, and a spool disposed in the chamber and configured to move within the chamber, such that a first operating position of the valve is defined when the spool is in a first position in the chamber, and a second operating position of the valve is defined when the spool is in a second position in the chamber. The valve also includes a magnetic element connected to the spool and responsive to a magnetic field such that the spool is biased in a first direction when the spool is in the first position and the spool is biased in a second direction when the spool is in the second position, and the second direction is different from the first direction.

Abstract: In one example, a mixing header includes a body that defines a fluid passage having an inlet side and an outlet side. The mixing header also includes a flow conditioning element that is connected to the body and arranged for fluid communication with the fluid passage. The flow conditioning element also includes a plurality of elements each connected to, and extending outwardly from, a hub.

Abstract: In one example, a mixing header includes a body that defines a fluid passage having an inlet side and an outlet side. The mixing header also includes a flow conditioning element that is connected to the body and arranged for fluid communication with the fluid passage. The flow conditioning element also includes a plurality of elements each connected to, and extending outwardly from, a hub.

Abstract: In one example, a fluid system component includes a first element and a second element, where one or both of the first and second elements are configured to be exposed to a fluid. The fluid system also includes a flexible diaphragm positioned between the first and second elements. Finally, the fluid system component includes one or more retaining elements, each retaining element having a first portion received in the first element and a second portion received in the second element. The retaining elements also extend through the flexible diaphragm.

Abstract: An apparatus for operably connecting an electrical source to a conductive coating or film. The apparatus may include a substrate made of a structural material. A conductive coating or thin film may be applied to the substrate. An interface layer may be applied over the conductive coating and conduct electricity thereto while transferring insufficient force to separate the conductive coating from the substrate. A conductor, for providing electricity to the interface layer comprising strands configured to be separable and electrically conductive, may be positioned in contact with the interface layer. A clamping mechanism may apply a clamping load urging the conductor toward the conductive coating. The strands of the conductor may be formed to distribute mechanical stress and strain induced by thermal expansion and the clamping load sufficiently to substantially reduce damage to the mechanical and electrical integrity of the conductive coating.

Abstract: A method for adhering a resistive coating to a substrate for use in process fluids employed in the semiconductor processing industry in clean, particle-free, nonreactive, non-trapping, ultra-pure, thermally tolerant, sealed systems. In one arrangement, the method may include the steps of selecting a substrate having a wall, modifying a surface of the wall to provide a roughened texture suitable for mechanically securing a coating thereto, and applying a conductive coating that is configured to be electrically resistive, to extend over at least a portion of the roughened texture, and to adhere thereto throughout variations in operational temperatures thereof.