Abstract: A mechanical pump having a unitary construction such that the fluid being pumped is prevented from leaking without requiring the use of discrete seal elements. The absence of discrete seal elements and integral coupling of various components of the pump substantially reduces the likelihood of failure of potential leak points. This allows the pump to operate continuously for a longer period and with greater reliability than previously utilized pumps. The pump can be utilized in a greater number of applications without requiring special design consideration for the fluid being pumped. The absence of discrete seal elements also reduces the cost and complexity of manufacturing the pump.

Abstract: A heater comprising a conduit made of corundum (e.g. synthetic sapphire) and having a wall forming a closed cross-section with an interior surface, and an exterior surface. At least one of the interior and exterior surfaces may have a roughened portion comprising inclusions and corresponding protrusions formed substantially continuously therethroughout. An electrically resistive coating may extend substantially continuously over, in, and around the inclusions and protrusions of at least a part of the roughened portion to form a conformal cross-section having a thickness selected to promote bending thereof to accommodate annular expansion and contraction occurring in response to a differential in the coefficients of expansion between the electrically resistive coating and the conduit.

Abstract: A pneumatic oscillator for providing pumping force to a pump. The oscillator has a single valve for controlling both the rate of oscillation of the oscillator and the flow of air. The valve includes a shuttle member and a detent mechanism. The detent mechanism controls the air flow in the oscillator and to the pump to which the oscillator is attached and the detent mechanism for regulating oscillation of the shuttle member. The configuration of the shuttle member and the detent mechanism eliminates the need for an additional valve to regulate oscillation of the oscillator. A cycle controller corresponding with the detent mechanism is adapted to change the rate of oscillation of shuttle member such that the need for additional valves or controllers for regulating the rate of oscillation is obviated.

Abstract: A fiber optic system for detecting a stroke of a pump, the fiber optic system including a first fiber optic line configured for directing light onto a portion of the pump that moves during the stroke of the pump. The system further includes a second fiber optic line configured for receiving light that has been transmitted from the first fiber optic line and reflected by the portion of the pump, wherein receipt of the light by the second fiber optic line occurs at a specified point during the stroke of the pump. The moving portion of the pump may be the diaphragm, the reciprocating portion, or any other part of the pump that cycles at regular intervals as the pump operates.

Abstract: A pump for ultra-pure fluids comprises a flexible diaphragm separating a fluid chamber from an air chamber. The diaphragm creates an airtight seal between the fluid chamber and the air chamber. Any leak from the fluid chamber into the air chamber is detected by a fiber optic system comprising an element and two optical fibers that are disposed such that light is detected by the second optical fiber only when the element is not in contact with liquid. A second fiber optic system can also be used to determine the stroke of an oscillating member by disposing the fiber optic lines at an angle calculated to reflect light off of the oscillating member when the member arrives at a predetermined location. The fiber optics are adapted to be resistant to corrosion, non-igniting, and non-contaminating.

Abstract: A heater for fluids, the heater comprising a conduit having a wall and a surface, the conduit being configured to convey a fluid. In one arrangement, the conduit surface is roughened to mechanically secure a coating thereto. A conductor, configured to be electrically resistive and to extend over at least a portion of a roughened surface, and to adhere thereto throughout variations in operational temperatures thereof. The heater provides a clean, particle-free, non-reactive, non-trapping, ultra-pure, thermally tolerant, sealed system. The system maintains process fluids clean, even upon system failure, at contaminant levels below parts per billion, or even parts per trillion. In one arrangement, the heater comprises a quartz conduit with an electroless nickel plating of an engineered thickness on an external surface forming a resistive heater. The resistive heater conducts thermal energy through the wall of the conduit.

Abstract: A method for adjusting resistivity of a film heater on a substrate for use in process fluids employed in the semiconductor-processing industry as part of a clean, particle-free, nonreactive, non-trapping, ultra-pure, thermally tolerant, sealed system. In one arrangement, the method includes the steps of selecting a heating rate, selecting an electrical resistance value in accordance with the heating rate, selecting a resistive material for coating a substrate to produce resistance heating consistent with the electrical resistance value, selecting dimensions for a film of the resistive material selected to balance effects of conductivity, resistivity, length, and area against effects of the heating rate, and forming the film by conformally coating a surface of the substrate with the film at the selected dimensions.

Abstract: A method for forming a resistor on a roughened surface for use in process fluids employed in the semiconductor-processing industry as part of a clean, particle-free, nonreactive, non-trapping, ultra-pure, thermally tolerant, sealed system. In one arrangement, the method for forming the resistor includes the steps of selecting a coating for the roughened surface from among the group of resistive materials, roughening a surface to promote mechanical adherence of the coating to the selection of a coating comprising resistive material, roughening a surface for promoting mechanical adherence of the resistive material thereto, and electroplating the resistive material onto the roughened surface to provide a uniformly controllable resistance in the coating.

Abstract: A pump for ultra-pure fluids comprises a flexible diaphragm separating a fluid chamber from an air chamber. The diaphragm creates an airtight seal between the fluid chamber and the air chamber when a self-centering and trapezoidal shaped wedge compressively forces the diaphragm into a trapezoidal shaped perimeter cavity surrounding the chambers. Any leak from the fluid chamber into the air chamber is detected by a fiber optic system comprising two optical fibers that are disposed at an angle that is calculated to enable light to pass between the fibers only in the presence of a liquid having a predetermined index of refraction. The fiber optic system can also be used to determine the stroke of the pump by disposing the fiber optic lines at an angle calculated to reflect light off of the oscillating diaphragm when the diaphragm arrives at a predetermined location.

Abstract: A pump for ultra-pure fluids, such as hot, de-ionized water, processing acids, and the like, such as those used in the semiconductor processing industries, is designed to operate at greater than 10 and often 30 or 50 million cycles without failure, and to be failclean. A diaphragm pump maintains a free diaphragm, supported in a contoured chamber for driving and being driven by a piston, able to move radially, rather than absorbing misalignment or distortions. A self-energizing, self-centering, trapezoidal seal captures a constant-thickness diaphragm between a head and body forming the chamber of the pump, separating a body portion and a head portion. An oriented, calendered, multi-layered chlorofluorocarbon diaphragm may be the same material chemically as the body, head, or both. Non-reactive pilots control an operating (motive) fluid, detecting the end-of-stroke whether near the head or near the body.

Abstract: A burst disk assembly relies on a brittle material as the burst disk. Conventional manufacturing tolerances are suitable with the mounting assembly. Flatness and collinearly are achieved by an alignment adapter interfacing between an anvil and the burst disk, on the low-pressure side thereof. A seal, typically thinner than the alignment adapter, is held against the high-pressure side face of the burst disk by a pilot or loader face. All materials are ultra-pure, high-temperature tolerant, and non-reactive. Thin films over metal are not used. Reliable, repeatable, predicable burst pressures have been achieved without resort to highly specialized manufacturing processes. Ceramics and crystalline materials may serve as a burst disk, and quartz has been shown effective. Various grades of fluorocarbon materials have been found to provide suitable coatings, fixtures, and seals. Expanded polytetrafluoroethylene forms a suitable seal. Slightly expanded PTFE such as that sold under the brand-name "Gylon.TM.

Abstract: Sealing assemblies are illustrated for heaters, pumps, conduits, and the like for handling process fluids used in the semiconductor-processing industry. Clean, particle-free, nonreactive, non-trapping, ultra-pure, thermally tolerant, sealed systems are required to maintain process fluids with contaminant levels below parts per billion, or even trillion. A lip seal connects a tube, having a lip at each end, to a face of a creeping material. A creeping fluorocarbon sealing material may form the interface for reducing stress concentrations on the tube, and for providing a consistent reliable seal between the lip and the creeping face. A face seal between creeping faces may be effected by a creeping sealant there between. The faces may be loaded entirely by their own creeping structural materials. No flanges are required. In certain embodiments, retaining rings may be provided for preventing unrestrained creep of sealing assemblies.