Abstract: A photodetector interface circuit is described, residing partially or fully within a unit cell per pixel of an FPA. The interface circuit uses an innovative approach to providing pixel level digitization for full frame integration times while maintaining the ability to use integration capacitors of practical sizes. The technique uses successive charge subtraction, removing charge from an integration capacitor successively, triggered by the charge increasing sufficiently to charge the integrator to a reference level, thereby triggering both charge removal and incrementing a count, until all of the current flowing in the photodetector has been accounted for and the count represents the digitization of the photodetector signal. Various options on how to arrange the digitization elements are also disclosed.

Abstract: A photodetector interface circuit is described, residing partially or fully within a unit cell per pixel of an FPA. The interface circuit uses an innovative approach to providing pixel level digitization for full frame integration times while maintaining the ability to use integration capacitors of practical sizes. The technique uses successive charge subtraction, removing charge from an integration capacitor successively, triggered by the charge increasing sufficiently to charge the integrator to a reference level, thereby triggering both charge removal and incrementing a count, until all of the current flowing in the photodetector has been accounted for and the count represents the digitization of the photodetector signal. Various options on how to arrange the digitization elements are also disclosed.

Abstract: Bias circuit elements for applying voltages/currents to a photodetector are described. Bias circuit elements described are active devices, e.g. mosfets, directly connected to the photodetector signal point, which inject noise that will be amplified/integrated. Lowering 1/f noise in these bias devices uses multiple parallel mosfets and switching the parallel mosfets gates between a bias activation level signal and a voltage sufficient to drive the mosfet into accumulation Gate switching may be accomplished by at least two partially out of phase clocking signals, with at least one parallel mosfet applying bias while another is in accumulation in continuously switched time periods. Gate switching at a frequency higher than the imaging bandwidth, will have negligible effect on the image signal. During the accumulation phase traps present within the conducting channel of each MOSFET will be depopulated, essentially resetting the MOSFET's 1/f noise, allowing for long integration times while controlling 1/f noise.

Abstract: A clamping system and a method of clamping a work piece are disclosed. The clamping system has an electrostatic clamp and a high-impedance voltmeter (“HIV”). The electro-static clamp may include a platen and a plurality of electrodes embedded in the platen. In use, at least some of the embedded electrodes provide one side of a capacitor and a work piece provides another side of the capacitor in order to hold the work piece relative to the platen when at least some of the embedded electrodes are electrically charged. The HIV is electrically connected to at least some of the embedded electrodes.

Abstract: A system which may be used to control, monitor and optimize an electrostatic clamp is disclosed. In one embodiment of the invention, there is a computer, a control circuit, and at least one amplifier. Also, a signal assessing circuit may be included and used to provide a sensing signal to an output signal of the control circuit. The signal assessing circuit may provide a sensing signal that can be used to monitor the capacitance of the electrostatic clamp. Further, the signal assessing circuit may include circuitry which monitors performance of the electrostatic clamp, and provide performance information to the control circuit.

Abstract: A method and a system for positioning a sensor of an electrostatic force microscope is disclosed. In a method according to the invention, the AC bias voltage and DC bias voltage systems of the EFM are utilized to determine a sensor sensitivity “G”, which is then used to adjust the position of the sensor or the AC bias voltage in a manner that reduces the risk of arcing and/or contact between the sensor and the surface to be analyzed.

Abstract: Embodiments include apparatus and method of detecting radiation. One embodiment comprises device for detecting radiation. The device comprises a sensor configured to generate an electrical signal in response to radiation and a test circuit configured to provide an electrical signal to the sensor. Certain embodiments are configured as nuclear event detectors that are configured to detect radiation from a nuclear event.

Abstract: An electrostatic voltmeter has an input sensing terminal, a first operational amplifier, a second operational amplifier, a first reference voltage terminal electrically connected to the non-inverting input of the second operational amplifier, a low reference voltage terminal electrically connected to the output of the second operational amplifier, and a voltage indicator, electrically connected between the low reference voltage terminal and the first reference voltage terminal.

Abstract: An ion balance monitor for simultaneous monitoring of the positive and negative ion production rates, and therefore ion concentration, by measurement of currents resulting from the presence of airborne ions as created for example by an air (gas) ionizer. Additionally it examines the ion balance by comparing the aforementioned currents. Information acquired in this way can be used in real time monitoring of the ionizer. Ion balance and production rate of ions of both polarities can be recorded by the ion monitor, regardless of the type of the ionizer. The ion monitor can provide a feedback signal needed to keep an ionizer system in balance.

Abstract: A non-contacting electrostatic voltmeter (ESVM) technique and apparatus having a spacing-independent dynamic response characteristic. Using the disclosed technique, an ESVM apparatus is capable of detecting and measuring electrostatic voltages and/or fields over wide variations of sensing probe to measured surface spacing with little or no variation in the dynamic response (speed and waveform) of the reported electrostatic voltage being measured. Disclosed is a feedback circuit that provides the spacing independence of the speed of response of an electrostatic voltmeter. In particular, the method and apparatus of the invention provides an AC-type auxiliary feedback loop that provides a means for a DC-feedback electrostatic voltmeter to maintain a fixed gain and thus stable response of the DC loop over a broad range of distances between the sensing electrode and measured surface.

Abstract: A platen for electrostatic wafer clamping apparatus comprising a platen body of dielectric material and grains of electrically conductive material diffused in the dielectric material so that the platen has a relatively large electrostatic capacitance due to the diffusion of the conductive grains with the result that the platen provides an increased clamping force regardless of humidity. In accordance with another aspect of the invention, the thickness of the platen body can be decreased by an amount sufficient to maintain a constant clamping force with reduced applied voltage, to eliminate any residual voltage on the platen and to increase the speed of wafer release. The grains of electrically conductive material are present in an amount of from about 2.5 percent to about 15.0 percent of the volume of the platen body, and the grains of electrically conductive material are selected from the group consisting of carbonated transition metals, nitrified transition metals and carbonated grains.

Abstract: A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. An amplifier and the sensitive electrode are combined in an assembly on the vibratory element thereby providing a low impedance amplifier output which in turn allows a narrow spacing around the vibratory element to prevent entry of contaminants. The vibratory element can be provided with a structure which allows measurements with various spatial resolution characteristics.

Abstract: A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. The driver transducer is at a location along the beam and is operated at a vibratory frequency such that a virtual mechanical node appears along the beam. This, in turn, reduces vibration at the mechanical attachment node so that the degree of stiffness of the mechanical node does not affect the operating frequency and/or the displacement at the free end of the cantilever.

Abstract: An electrostatic force microscope wherein electrostatic force applied to the detector is determined through obtaining the field distribution on several different shaped detectors with the calculation of the voltage distribution near the detector with the Finite Element Method to direct the measurement of the absolute charge amount on surface under test so that one can define the differences between the analysis and the results from the parallel plate model. Of interest is how large the error in the charge detection occurs in conjunction with thickness change of dielectric materials to be tested. There is provided a detector with cantilever which has proper shape for the spatial resolution of 10&mgr; made out of nickel foil for an electrostatic force microscope and the electrostatic force which appeared on it has been calculated.

Abstract: An electrostatic force microscope for measuring electrostatic force of a sample under test including a detector comprising a cantilever arm having a tip formation at one end and located so that electrostatic force is induced at the tip due to electrostatic charge on the sample under test, an optical system for transforming bending of the cantilever arm due to electrostatic force induced at the tip into an electrical signal containing a frequency component of the electrostatic force induced at the detector tip, a source for applying bias voltage to the detector, a detector for detecting the frequency component of the electrostatic force induced at the detector tip so that a measurement of electrostatic force on the sample under test can be obtained, and an electrostatic shield operatively associated with the cantilever arm. The shield is located between the cantilever arm and the sample under test, in particular in close spaced relation to the arm.

Abstract: Apparatus for determining the physical uniformity of a charged drum surface wherein current signals are induced in sensing electrodes in response to variation in drum surface charge. The sensing electrodes are on a detector assembly which is movable toward the drum for inspection of the surface and movable away from the drum after inspection when the drum is to be ejected from the apparatus. The detector assembly is movable through another degree of freedom to accommodate irregularities in drum geometry encountered during rotation thereof. The detector assembly also is provided with structure for maintaining a predetermined spacing of the sensing electrodes from the drum surface during relative movement therebetween. The drum is received, held, and rotated by co-operation between a drum retention assembly and a drum clamping mechanism.

Abstract: A surface capable of holding electrical charge wherein at least one sensing electrode having an edge is located in close physical proximity to the surface and is disposed so that upon relative movement between the surface and sensing electrode, charge on the surface crosses the edge of the electrode. The sensing electrode has a surface area facing the surface which is sufficiently small so as to minimize electrical noise when the electrode is in close proximity to the surface. Electrical charge is applied to the surface and relative movement is provided between the surface and sensing electrode while maintaining a constant distance therebetween. A current signal is induced in the sensing electrode in response to a variation in the surface charge crossing the edge of the electrode, and the signal is detected and electrical parameters thereof are measured to provide information on the charge density of the surface to determine the physical uniformity of the surface.