Patents Assigned to Trigon/Adcotech
  • Patent number: 5043589
    Abstract: An improved optical inspection apparatus, especially suited for inspecting semiconductor devices using a single camera. A highly polished mirrored stage is provided with a light source extending upwardly therethrough and providing a pedestal upon which the object to be inspected is centered. A plurality of stationary reflectors are disposed around the stage and function in concert with two separate movable reflectors to provide optical scanning over the appropriate surface portions of the device. A separate movable reflector system is used to maintain a constant focal path length between the device and the camera as the other movable reflectors scan the device, thus ensuring proper focus and measurement accuracy.
    Type: Grant
    Filed: May 18, 1990
    Date of Patent: August 27, 1991
    Assignee: Trigon/Adcotech
    Inventors: Rodney Smedt, Ian Raphael