Abstract: In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts.
Type:
Grant
Filed:
March 26, 2014
Date of Patent:
February 21, 2017
Assignee:
TRIPLE CORES KOREA CO., LTD.
Inventors:
Ik Nyun Kim, Sung Ok Kang, Min Heum Eum
Abstract: In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts.
Type:
Application
Filed:
March 26, 2014
Publication date:
October 2, 2014
Applicant:
TRIPLE CORES KOREA CO., LTD.
Inventors:
Ik Nyun Kim, Sung Ok Kang, Min Heum Eum
Abstract: Provided is an atmospheric plasma equipment and a waveguide for the same. The atmospheric plasma equipment according to this disclosure includes: an oscillator supplying an electromagnetic wave; and a waveguide into which the electromagnetic wave generated from the oscillator is input to be propagated therethrough, wherein the waveguide includes at least one or more steps, and plasma is generated at a waveguide region including a final short portion. The atmospheric plasma equipment may simultaneously attain an effect of causing concentration of an electromagnetic wave applied through the waveguide with one or more steps and an effect of stably maintaining generated plasma.