Abstract: A microprocessor controlled bellows-type pump system for the precise and accurate pumping and dispensing of fluids. The pump comprises a longitudinally contracting bellows which is supported from warping under fluid pressure by a support bushing in contact with the inside folds of the bellows. A stepper motor drives the bellows position via a lead screw. A system of four valves: a dispense valve, shut-off valve, vent valve, and suck-back valve, control fluid routing within a manifold. One or two pressure transducers allow the microprocessor to control valve positions and stepper motor turning for well behaved dispensing operations.

Abstract: Circularly polarized light is used to detect an end point of a thin film layer. Collimated light is passed through a polarizing filter and a polarizing beam splitter resulting in light which is almost entirely linearly polarized in a first direction. This first direction polarized light is passed through a quarter wave retarder and is converted to circularly polarized light. The circularly polarized light is reflected off of a surface having a thin film layer and passes back through the quarter wave retarder. This reflected circularly polarized light is converted by the quarterwave retarder into linearly polarized light having a second direction. This second direction polarized light is easily isolated by passing it back through the beam splitter. The light may then be analyzed by end-point detection circuitry and the end-point of the film layer detected.

Abstract: A quick release closure for bottles which provides access to fluids contained therein. The closure includes a U-shaped spider portion having two opposed pairs of legs, and a disk-shaped plug portion having two opposed pairs of slots for receiving the legs and for fitting within the spider. Each leg includes an inward facing lip at a distal end for engaging a flange around a bottle neck, and an outward seal face for abutting an O-ring encircling the plug. The legs also include, at a proximal end, an inward facing wedge for engaging the slots of the plug whereby the legs may be urged outward as the plug rides up over the wedge. The plug further includes a ring-shaped cavity for sealingly receiving the mouth of a bottle, and a pair of fluid channels, having internal openings formed within the ring-shaped cavity, and external openings formed between the slots of the plug.

Abstract: A bottle closure device having a stem member with an enlarged top portion, a collar resiliently biased away from the top portion, a retainer member on the end of the stem, and an O-ring between the retainer member and the collar. When the end of the stem is placed within the mouth of a bottle, the biasing means acts to cause the retainer member to press the O-ring radially outward against the collar to form a fluid-tight seal with the mouth of the bottle.

Abstract: A system for dispensing liquid chemicals, such as photoresist, from containers which includes a valve to govern the flow from the containers, a reservoir to intermediately hold the chemicals prior to pumping, and a level detector to monitor the liquid in the reservoir and to control the valve, and an aspirator to remove air from the reservoir. The aspirator is activated in response to signals from the level detector indicating that the reservoir level is low. The increased suction causes liquid to be drawn from the container into the reservoir. If after a period of time the level detector indicates the reservoir level is still low, the valve will cause liquid to be drawn from a different container. The aspirator is deactivated a period of time after the level detector indicates that the reservoir level is normal.

Abstract: An automatic vent valve having a stoppage member within a flow chamber located between an inlet chamber and vent chamber with said stoppage member being biased against a lower seat. The stoppage member moves between said lower seat and an upper seat in response to pressure changes associated with the operation of a positive displacement pump which either overcomes said biasing means or allows said biasing means to function. During the movement of the stoppage member between the upper and lower seats a flow path exists between the inlet chamber and vent chamber such that gases and/or fluid are vented on each stroke of the pump.

Abstract: A system for the metered pumping and dispensing of fluid includes a filter for the pumped fluid and a pump connected to the filter. The pump is of the displacement type which includes a tubular, longitudinally-contractable bellows to receive fluid for pumping, fluid-activated reciprocating means to expand and contract the bellows, and means to selectively introduce working fluid to the reciprocating means. A rigid fluid-tight chamber is formed to surround the bellows, and means are provided to selectively introduce working fluid into chamber, whereby the working fluid assists in contracting the bellows as well as in partially balancing the internal pressure on the bellows.

Abstract: A fluidically-operated respirator comprises an apneic event circuit (10) and a demand gas circuit (20). The apneic event circuit (10) comprises a variable capacitance device (132) and an exhaust means (130) which rapidly discharge fluid from the circuit (10) when an inspiration occurs. If an apneic event occurs, the circuit (10) activates one or more signals (136) as a predetermined volume of fluid is built up in the circuit (10). The demand gas circuit (20) of the respirator supplies respirating gas to a patient at the beginning of an inspiration and for a time period which is a fraction of the duration of the inspiration.

Abstract: A fluidically-operated respirator comprises an apneic event circuit (10) and a demand gas circuit (20). The apneic event circuit (10) comprises a variable capacitance device (132) and an exhaust means (130) which rapidly discharge fluid from the circuit (10) when an inspiration occurs. If an apneic event occurs, the circuit (10) activates one or more signals (136) as a predetermined volume of fluid is built up in the circuit (10). The demand gas circuit (20) of the respirator supplies respirating gas to a patient at the beginning of an inspiration and for a time period which is a fraction of the duration of the inspiration.