Abstract: A source module (12) generates mutually orthogonally polarized beams of light as emanating from two spatially separated point sources (Sv, Sw) for use in a phase shifting interferometer.
Type:
Grant
Filed:
November 26, 2003
Date of Patent:
August 23, 2011
Assignee:
Trology, LLC
Inventors:
Piotr Szwaykowski, Federick N. Bushroe, Raymond J. Castonguay
Abstract: A back-end assembly for use with a front-end assembly in acquiring phase-shifted interferograms having a plurality of imaging modules (Ma, Mb, Mc). Each module (Ma, Mb, Mc) has a quarter wave plate (30a, 30b, 30c), a polarizer (32a, 32b, 32c), and an image sensor (34a, 34b, 34c) so that each polarizer has a different rotation orientation thus acquiring phase-shifted interferograms.
Type:
Grant
Filed:
November 26, 2003
Date of Patent:
January 27, 2009
Assignee:
Trology, LLC
Inventors:
Piotr Szwaykowski, Raymond J. Castonguay, Frederick N. Bushroe