Abstract: The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 ?m/min, and the passivation layer is a SiON passivation layer.
Type:
Grant
Filed:
December 11, 2009
Date of Patent:
March 25, 2014
Assignee:
TrueLight Corp.
Inventors:
Jin Shan Pan, Cheng Ju Wu, I Han Wu, Kuo Fong Tseng