Abstract: Power supply devices for generating at least one electric high-frequency power signal for a plasma having at least a first plasma state and a second plasma state are provided. The power supply devices are configured to determine a first variable that characterizes a power reflected by the plasma in the first plasma state, determine a second variable that characterizes a power reflected by the plasma in the second plasma state, generate a third variable based on the first variable and the second variable, and control at least one of a frequency or a power of the high-frequency power signal based on the third variable.

Abstract: Methods and systems for impedance matching between loads and power generators are provided. The methods include: supplying a power generated by a power generator to a load by an impedance matching system that includes at least one reactance adjustable by at least one actuator and is configured to transform the load impedance at an input end of the load into a transformed load impedance at an input end of the impedance matching system, determining a power reflected at the load or at least one variable associated with the reflected power, determining, based on the reflected power or the at least one variable, that there is a mismatch, determining a trajectory in a complex load plane according to at least one specified criterion, and controlling the at least one actuator such that the transformed load impedance follows the trajectory to match an output impedance of the power generator.

Abstract: The invention relates to high-frequency amplifier apparatuses suitable for generating power outputs of at least 1 kW at frequencies of at least 2 MHz. The apparatuses include two LDMOS transistors each connected by their source connection to ground. The transistors can have the same design and can be arranged in an assembly (package). The apparatus also includes a circuit board lying flat against a metallic cooling plate and connected to the cooling plate, which can be connected to ground, and the assembly is arranged on or against the circuit board. The apparatuses have a power transformer, whose primary winding is connected to the drain connections of the transistors, and a signal transmitter. A secondary winding of the signal transmitter is connected to the gate connections of the two transistors. Each of the gate connections is connected to ground via at least one voltage-limiting structural element.

Abstract: A non-linear high-frequency amplifier arrangement suitable for generating power outputs ?1 kW at frequencies of ?1 MHz for plasma excitation is provided. The arrangement includes two LDMOS transistors each connected by their source connection to aground connection point, where the LDMOS transistors have the same design and are arranged in an assembly, a power transformer whose primary winding is connected to drain connections of the LDMOS transistors, a signal transformer whose secondary winding is connected by a first end to a gate connection of one LDMOS transistor and by a second end to a gate connection of the other LDMOS transistor, and a feedback path from the drain connection to the gate connection of each of the LDMOS transistors.

Abstract: The invention relates to a device for generating a plurality of clock signals or high-frequency signals. The devices includes a reference signal generator, which is connected to an oscillator and generates at its output a reference signal with a reference frequency fx. The device also includes at least one signal processor, for example, a DDS, which is connected to the reference frequency generator via a first signal line and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency less than fx.

Abstract: A power combiner for coupling, splitting, or coupling and splitting high-frequency signals, the power combiner has a first input for a first high-frequency signal, a second input for a second high-frequency signal, an output, an equalizing connection, a first electrical conductor arranged between the first input and the output, wherein the first electrical conductor has a first total surface shaped primarily as a first planar surface electrode, a second electrical conductor arranged between the second input and the equalizing connection, wherein the second electrical conductor has a second total surface shaped primarily as a second planar surface electrode, and wherein the second electrical conductor is capacitively and inductively coupled to the first electrical conductor; and a cooling body, wherein more than 70% of the first total surface of the first electrical conductor is a same distance from the cooling body as the second total surface of the second electrical conductor.

Abstract: A power supply system comprises an amplifier stage that includes at least one transistor, for example an LDMOS transistor. The transistor is connected to a supply voltage via a power connection, and is controlled by a control voltage at the control connection of the transistor. In some implementations, a first controller is provided for adjusting the control voltage of the transistor, and a second controller is provided for adjusting the supply voltage. In some implementations, one of the controllers is designed to feed a state signal to the other controller, and the other controller is designed to evaluate the state signal.

Abstract: A cooling device for cooling at least one electronic component, as well as an electronic assembly with a cooling device and an electronic component. The cooling device has at least one cooling body through which a cooling medium flows. The cooling device further includes a cooling plate defining a through recess in which the cooling body is arranged at least in part. A through recess is particularly easy to produce, so that the complete cooling device can be manufactured very cost effectively. At least one cooling pipe in direct contact with the cooling plate and/or the electronic component to be cooled transports cooling medium from and to the cooling body, so that the cooling device can effectively absorb heat generated at the electronic component.

Abstract: This disclosure relates to directional couplers and methods of tuning directional couplers formed in a printed circuit board. The directional couplers include a main line for transmitting power and at least one secondary line having a coupling portion arranged parallel and at a distance from the main line in a coupling region. The directional coupler includes one or more additional coupling lines that have a coupling portion that runs parallel to and at a distance from the coupling section of the at least one secondary line. The one or more additional coupling lines have a connection arranged on the outer portion of the printed circuit board for selective grounding or connection to an external connection.

Abstract: The invention relates to a redox flow battery system, comprising a controller and a battery inverter, which is suitable for charging and/or discharging a battery. The battery inverter comprises: a) a plurality of battery connections, to each of which at least one battery can be connected; b) a first measuring device, which is suitable for measuring the voltage at a battery connection and which is connected to the controller with regard to signaling; c) a second measuring device, which is suitable for measuring the current at a battery connection and which is connected to the controller with regard to signaling; d) a grid connection, which can be connected to an alternating-current supply grid; and e) a plurality of DC/DC converters, of which at least one has a first bridge circuit directly connected to a battery connection.

Abstract: High-frequency amplifier apparatuses suitable for producing output powers of at least 1 kW at frequencies of at least 2 MHz for plasma excitation are disclosed. These high-frequency amplifiers include two transistors, the source or emitter connections of which are each connected to a ground connection point. The transistors can have an identical design and are arranged on a multilayer printed circuit board. The apparatus also includes a power transformer, the primary winding of which is connected to the drain or collector connections of the transistors. The primary winding and the secondary winding of the power transformer are each in the form of planar conductor tracks which are arranged in different upper layers of the multilayer printed circuit board.

Abstract: A power supply system includes a power converter configured to generate a high-frequency power signal and be connected to a load to supply a plasma process or gas laser process with power. The power converter includes at least one amplifier stage having first and second amplifier paths each having an amplifier. The first and second amplifier path are connected to a phase-shifting coupler unit that is configured to couple phase-shifted output signals from the first and second amplifier paths to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths includes a field effect transistor implemented in a semiconductor device with a semiconductor structure having a substantially layered construction, and the semiconductor device includes a channel, a current flowing in the channel substantially in parallel with layers of the semiconductor structure.

Abstract: An overvoltage limitation device, for an alternating current (AC) voltage generating system having an inverter circuit unit configured to supply power to a load with dynamic load impedance, includes: input connections for connection to the inverter circuit unit, output connections for connection to an intermediate circuit voltage unit connected to the inverter circuit unit, a rectifier including an alternating current connection and a direct current connection connected to the output connections, and an AC voltage converter including a primary side connected to the input connections and a secondary side connected to the alternating current connection. The overvoltage limitation device is configured such that, when peak values of an AC voltage exceed a first predetermined value at the input connections, power is transported from the input connections via the AC voltage converter and the rectifier to the output connections, and thus the AC voltage is limited to a second predetermined value.

Abstract: A power supply system includes a digital-to-analogue converter (DAC) configured to generate an analogue signal and an amplifier path on which the analogue signal is amplified to generate a high-frequency power signal to be provided to a plasma chamber for supplying a plasma process with high-frequency power. The DAC is configured to be connected to an arc detection device that is configured to monitor the plasma chamber for arcs and be controlled by the arc detection device to modify the analogue signal in response to detecting an occurrence of an arc.

Abstract: A power combiner in the form of a balanced LC combiner is provided. Inputs of the power combiner are isolated from one another via at least one RC matching element. The at least one RC matching element is dimensioned such that the connection between the inputs is at a stable potential during operation of the power combiner at at least one position. The power combiner can be formed in a planar design and have electrically conductive layers running parallel to one another. At least an inductor and a combiner capacitor are formed in the electrically conductive layers. A power combiner arrangement including the power combiner and high-frequency signal sources attached at least two inputs is also provided. The high-frequency signal sources can be in the form of frequency-agile transistor amplifiers.

Abstract: An energy storage system including an energy store with a plurality of flow batteries, a first voltage converter, an intermediate circuit connected to the first voltage converter, a second voltage converter connected to the intermediate circuit and a first of the batteries, a third voltage converter connected to the intermediate circuit and a second of the batteries, and a controller connected to the first, second, and third voltage converters. The controller is configured to simultaneously control a power flow direction of the second voltage converter and a power flow direction of the third voltage converter such that the power flow direction of the second voltage controller is in an opposite direction of the power flow direction of the third voltage controller, to control a power flow direction of the first voltage controller, and to charge and discharge the batteries.

Abstract: A method of maintaining a supply of power to a load comprising operating a power generator connected to a mains voltage in a rated operating mode, generating a power signal by the power generator, feeding the power signal to the load, monitoring the mains voltage or a variable derived therefrom for an occurrence of a first specified event, and operating the power generator in a first predefined operating mode based on the occurrence of the first specified event, wherein the first predefined operating mode differs from the rated operating mode.

Abstract: A method for producing an arc detection signal on the basis of a plurality of observation signals comprises producing an arc detection part-signal for each of at least two observation signals. Producing each of the part-signals includes correlating the respective observation signal with a correlation signal by influencing the correlation signal with the respective observation, thereby producing a correlation result; producing or modifying a coefficient on the basis of the correlation result; and weighting the respective observation signal with the coefficient. The arc detection part-signals are added to form the arc detection signal.

Abstract: An electric power conversion device for charging and discharging energy storage devices having at least one bidirectional voltage converter which can be connected to a power supply network and to at least one electrochemical energy converter for an energy storage device that is configured as a flow battery and has a circulation arrangement for electrolytes. The electric power conversion device has a controller connected to the voltage converter and is designed to control the voltage converter with regard to the power flow direction thereof. The controller is designed to control one or more energy storage peripheral devices associated with the electrolytes depending on the power flow direction of the voltage converter specified by the controller. The controller has at least one control port for connection of at least one of these energy storage peripheral devices.

Abstract: Devices and methods for monitoring a discharge in a plasma process are provided. An example method includes detecting at least a first signal path of at least one plasma supply signal within at least a first time range within at least one period of the plasma supply signal, detecting at least a second signal path of the at least one plasma supply signal within at least a second time range which is at the point corresponding to the first time range in at least one other period of the plasma supply signal, and generating an identification signal if the second signal path deviates by at least a distance from the first signal path. The distance has a minimum time difference and a minimum signal amplitude difference. The method enables to identify arcs in a very reliable and very rapid manner.