Abstract: A method determines translational and/or rotational deviations between the measurement coordinate system of a measurement mirror scanner and the processing coordinate system of a processing mirror scanner. A measurement beam reflected at a workpiece returns on a path of an incident measurement beam and is captured by a spatially resolving measurement sensor to ascertain spatially resolving information of the workpiece. The reflected measurement beam, in a sensor image of the measurement sensor, is imaged onto a previously known image position. This is accomplished by ascertaining a focal position deviation of the processing beam by scanning with the processing beam, evaluating a laser power detected at grid points, fixing the processing mirror scanner, capturing spatially resolving height information of the pinhole diaphragm by the measurement sensor, and determining a translational deviation between the processing and measurement coordinate systems based on the deviation.
Type:
Grant
Filed:
November 6, 2019
Date of Patent:
April 9, 2024
Assignees:
TRUMPF Laser- und Systemtechnik Gm
H, TRUMPF Laser GmbH
Inventors:
Martin Stambke, Jan-Patrick Hermani, Thomas Notheis, Alexander Sauter