Patents Assigned to TSMC CHINA COMPANY, LIMITED
  • Publication number: 20240395904
    Abstract: A semiconductor device includes a source region, a drain region, a gate structure, a first gate spacer, and a second gate spacer. The source region and the drain region are in a substrate. The gate structure is laterally between the source region and the drain region. The first gate spacer is on a first sidewall of the gate structure. The second gate spacer is on a second sidewall of the gate structure. The first gate spacer has more layers than the second gate spacer.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 28, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Feng HAN, Lei SHI, Hung-Chih TSAI, Liang-Yu SU, Hang FAN
  • Publication number: 20240397747
    Abstract: An organic light emitting diode display includes an integrated circuit, a first electrode, a spacer, an organic material stack layer, and a second electrode. The first electrode is electrically connected to the integrated circuit and has a top surface, a bottom surface, and an inclined surface connecting the top and bottom surfaces. An angle between the inclined surface and the bottom surface is in a range from about 45 degrees to about 80 degrees. The spacer is disposed to cover the inclined surface of the first electrode. The organic material stack layer is disposed on the first electrode. The second electrode is disposed on the organic material stack layer and the spacers.
    Type: Application
    Filed: July 31, 2024
    Publication date: November 28, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Shui-Liang CHEN, Lin-Chun GUI, Jian HUANG, Lin-Lin TIAN
  • Patent number: 12100652
    Abstract: A semiconductor device includes a substrate, an active region, an isolation structure, a first metal line, gate structure, source/drain region, a source/drain contact, and a second metal line. The active region protrudes from a top surface of the substrate. The isolation structure is over the substrate and laterally surrounds the active region. The first metal line is in the isolation structure. The gate structure is over the active region. The source/drain region is in the active region. The source/drain contact is over the active region and is electrically connected to the source/drain region. The second metal line is over the gate structure and the source/drain contact, in which the second metal line vertically overlaps the first metal line.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: September 24, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Zhang-Ying Yan, Xin-Yong Wang
  • Publication number: 20240290381
    Abstract: A device is provided. The device includes multiple transistors, a first sense circuit, and a precharge circuit. The transistors are coupled to a tracking bit line and configured to generate a first tracking signal. The first sense circuit is configured to generate a first sense tracking signal in response to the first tracking signal. The precharge circuit is configured to generate, in response to a rising edge and a falling edge of the first sense tracking signal, a precharge signal for precharging data lines.
    Type: Application
    Filed: April 29, 2024
    Publication date: August 29, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC Nanjing Company Limited, TSMC China Company Limited
    Inventors: Xiu-Li YANG, He-Zhou WAN, Lu-Ping KONG, Wei-Yang JIANG
  • Publication number: 20240290824
    Abstract: A capacitor includes a first spiral electrode and a second spiral electrode. The first spiral electrode is over a substrate. The second spiral electrode is over the substrate and is concentric with the first spiral electrode. A first turn of the second spiral electrode connecting to a spiral center of the second spiral electrode is free of a via thereon.
    Type: Application
    Filed: May 7, 2024
    Publication date: August 29, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long CHEN
  • Publication number: 20240250170
    Abstract: A semiconductor device includes a gate structure, a drift region, a source region, a drain region, a first doped region, and a second doped region. The gate structure is over a semiconductor substrate. The drift region is in the semiconductor substrate and laterally extends past a first side of the gate structure. The source region is in the semiconductor substrate and adjacent a second side of the gate structure opposite the first side. The drain region is in the drift region. The first doped region is in the drift region and between the drain region and the gate structure. The second doped region is within the drift region. The second doped region forms a P-N junction with the first doped region at a bottom surface of the first doped region.
    Type: Application
    Filed: April 3, 2024
    Publication date: July 25, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC China Company Limited
    Inventors: Lian-Jie LI, Yan-Bin LU, Feng HAN, Shuai ZHANG
  • Patent number: 12034297
    Abstract: An integrated circuit includes a control circuit and first to second voltage generation circuits. The control circuit is coupled between a first voltage terminal providing a first supply voltage and a first node coupled to a first capacitive unit. The first voltage generation circuit includes at least one first transistor that has a source terminal receiving a second supply voltage, a drain terminal coupled to a second node in contact with a second capacitive unit, and a gate terminal coupled to the first node. The second voltage generation circuit is coupled to the first voltage terminal and the first and second nodes. Firstly the control circuit turns on the at least one first transistor to adjust a voltage level of the second node to have the second supply voltage. The second voltage generation circuit adjusts a voltage level of the first node to have the first supply voltage.
    Type: Grant
    Filed: April 19, 2023
    Date of Patent: July 9, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Kai Zhou, Lei Pan, Ya-Qi Ma, Zhang-Ying Yan
  • Publication number: 20240222120
    Abstract: A method includes performing a coating process on a first one of wafers to form a photoresist layer using a coating tool; after performing the coating process, retrieving the first one of the wafers to a cassette docked on the coating tool; transferring the cassette from the coating tool to a load port of an exposure tool external to the coating tool; transferring the first one of the wafers from the cassette on the load port of the exposure tool to a wafer stage of the exposure tool; performing an exposing process on the first one of the wafers to pattern the photoresist layer on the first one of the wafers.
    Type: Application
    Filed: March 27, 2023
    Publication date: July 4, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Xianhui ZHOU, Lei WANG, Jie CHEN, Zihao ZHANG, Renqin LIAO, Jilong GU
  • Publication number: 20240201719
    Abstract: A device includes a voltage regulator circuit configured to pull up a voltage at an output terminal to equal to half of a supply voltage; multiple first transistors coupled between the output terminal and a voltage terminal providing the supply voltage; and a control circuit configured to pull down gate voltages of the first transistors from the supply voltage to a voltage level between the supply voltage and a ground voltage at a first time. The first transistors are configured to pull up the voltage at the output terminal to the supply voltage at a second time.
    Type: Application
    Filed: February 28, 2024
    Publication date: June 20, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Yong-Liang JIN, Ya-Qi MA, Wei LI, Di FAN
  • Patent number: 12009388
    Abstract: A method includes forming a dielectric layer on a substrate; forming a first spiral electrode, a second spiral electrode, and a spiral common electrode in the dielectric layer, the first spiral electrode extending in a first spiral path, the second spiral electrode extending in a second spiral path, and the spiral common electrode extending in a third spiral path laterally between the first and second spiral paths.
    Type: Grant
    Filed: October 28, 2022
    Date of Patent: June 11, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Patent number: 12002507
    Abstract: A device is provided. The device includes multiple transistors, a first sense circuit, and a precharge circuit. The transistors are coupled to a tracking bit line and configured to generate a first tracking signal. The first sense circuit is configured to generate a first sense tracking signal in response to the first tracking signal. The precharge circuit is configured to generate, in response to a rising edge and a falling edge of the first sense tracking signal, a precharge signal for precharging data lines.
    Type: Grant
    Filed: December 20, 2022
    Date of Patent: June 4, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Xiu-Li Yang, He-Zhou Wan, Lu-Ping Kong, Wei-Yang Jiang
  • Patent number: 12002542
    Abstract: A device includes a first memory bank and a second memory bank. The first memory bank is configured to operate according to a write data signal and a first global write signal associated with a first clock signal. The second memory bank is configured to operate according to the write data signal and a second global write signal associated with a second clock signal. One of the first clock signal and the second clock signal is in oscillation when another one of the first clock signal and the second clock signal is in suspension.
    Type: Grant
    Filed: December 2, 2022
    Date of Patent: June 4, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Xiu-Li Yang, Kuan Cheng, He-Zhou Wan, Wei-Yang Jiang
  • Publication number: 20240178215
    Abstract: An integrated circuit includes a first transistor, a second transistor, a first power line, and a second power line. The first transistor has a first active region and a first gate structure, in which the first active region has a source region and a drain region on opposite sides of the first gate structure. The second transistor is below the first transistor, and has a second active region and a second gate structure, in which the second active region has a source region and a drain region on opposite sides of the second gate structure. The first power line is above the first transistor, in which the first power line is electrically connected to the source region of first active region. The second power line is below the second transistor, in which the second power line is electrically connected to the source region of second active region.
    Type: Application
    Filed: February 5, 2024
    Publication date: May 30, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC China Company Limited
    Inventors: Xin-Yong WANG, Li-Chun TIEN, Chih-Liang CHEN
  • Patent number: 11996479
    Abstract: A method of manufacturing a semiconductor device includes forming a gate electrode overlying a gate dielectric layer covering both a channel region in a second semiconductor region and a portion of a first semiconductor region. First-type dopants are implemented into the second semiconductor region masked by a hard mask to form a source precursor region. The method also includes forming a spacer which overlies the source precursor region and has a first side laterally adjacent to the gate electrode, and recessing a surface region in the source precursor region masked by the spacer to form a source region. The method still includes implanting second-type dopants through the surface region masked at least by the spacer to form a body contact region, and forming a conformal conductive layer covering an upper surface of the body contact region and a side surface of the source.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: May 28, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY, LIMITED
    Inventor: Zheng Long Chen
  • Publication number: 20240161798
    Abstract: A device includes a memory array, bit line pairs, word lines, a modulation circuit and a control signal generator. The memory array has bit cells arranged in rows and columns. Each bit line pair is connected to a respective column of bit cells. Each word line is connected to a respective row of bit cells. The modulation circuit is coupled with at least one bit line pair. The control signal generator is coupled with the modulation circuit. The control signal generator includes a tracking wiring with a tracking length positively correlated with a depth distance of the word lines. The control signal generator is configured to produce a control signal, switching to a first voltage level for a first time duration in reference with the tracking length, for controlling the modulation circuit. A method of controlling aforesaid device is also disclosed.
    Type: Application
    Filed: January 25, 2024
    Publication date: May 16, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Xiu-Li YANG, He-Zhou WAN, Mu-Yang YE, Lu-Ping KONG, Ming-Hung CHANG
  • Patent number: 11978797
    Abstract: A semiconductor device includes a gate structure, a drift region, a source region, a drain region, and a doped region. The gate structure is over a semiconductor substrate. The drift region is in the semiconductor substrate and laterally extends past a first side of the gate structure. The source region is in the semiconductor substrate and adjacent a second side of the gate structure opposite the first side. The drain region is in the drift region. The doped region is in the drift region and between the drain region and the gate structure. From a top view the doped region has a strip pattern extending in parallel with a strip pattern of the gate structure.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: May 7, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Lian-Jie Li, Yan-Bin Lu, Feng Han, Shuai Zhang
  • Patent number: 11973083
    Abstract: A method of making an integrated circuit includes surrounding a first bias pad with dielectric material of a buried oxide layer. The method includes adding dopants to a layer of semiconductor material over the first bias pad. The method includes depositing a gate dielectric and a gate electrode over a top surface of the layer of semiconductor material. The method includes etching the gate dielectric and the gate electrode to isolate a gate electrode over the layer of semiconductor material. The method includes depositing an inter layer dielectric (ILD) material over the gate electrode and the layer of semiconductor material. The method includes etching at least one bias contact opening down to the first bias pad. The method includes filling the at least one bias contact opening with a bias contact material. The method includes electrically connecting at least one bias contact to an interconnect structure of the semiconductor device.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: April 30, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY, LIMITED
    Inventors: Jian Wu, Feng Han, Shuai Zhang
  • Publication number: 20240128103
    Abstract: A method includes receiving, by a control module of a wafer transport system, an indication of wafer transporting; calculating, by the control module, a route for transporting a first wafer carrier according to the indication; moving, by a control unit of a wafer transport device of the wafer transport system, the wafer transport device to a first stocker storing the first wafer carrier along the route; performing, by the control unit, a safety monitoring process during a movement of the wafer transport device; stopping, by the control unit, the wafer transport device in front of the first stocker; and identifying, by an identification device of the wafer transport device, the first wafer carrier loaded on a rack of the wafer transport device.
    Type: Application
    Filed: March 31, 2023
    Publication date: April 18, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Qun DENG, Guang YANG, Qinhong ZHANG, Zihao CAO
  • Patent number: 11947372
    Abstract: A device includes a voltage regulator circuit configured to pull up a voltage at an output terminal to equal to half of a supply voltage; multiple first transistors coupled between the output terminal and a voltage terminal providing the supply voltage; and a control circuit configured to pull down gate voltages of the first transistors from the supply voltage to a voltage level between the supply voltage and a ground voltage at a first time. The first transistors are configured to pull up the voltage at the output terminal to the supply voltage at a second time.
    Type: Grant
    Filed: January 18, 2023
    Date of Patent: April 2, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Yong-Liang Jin, Ya-Qi Ma, Wei Li, Di Fan
  • Publication number: 20240103359
    Abstract: A reticle inspection and purging method comprises following steps. A first reticle is moved from a first load port of a lithography tool to a reticle inspection tool located outside the lithography tool. The first reticle is inspected using the reticle inspection tool located outside the lithography tool. Whether the first reticle is acceptable for exposure is determined based on the inspection result. In response the determination determines that the first reticle is not acceptable for exposure, the first reticle is purged.
    Type: Application
    Filed: February 23, 2023
    Publication date: March 28, 2024
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Xianhui ZHOU, Lei WANG, Zihao ZHANG, Huiming XU