Abstract: A mass fluid flow controller has a valve which is controlled by a controller rod which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod. The actuation of the rod movement is by the expansion and contraction of an actuator wire which is heated for the expansion and allowed to cool for the contraction. The primary fluid flow path through the controller is straight. A sensor conduit, providing a parallel sensor fluid flow path, is connected in position using metallic sealer members which extend into openings to the primary fluid flow path and which are rounded along the direction through such openings. The pressure drop, along the primary fluid flow path, to create flow through the sensor conduit, is provided by a fluid flow restrictor having a core and having lengths of wire along the core which are squeezed between the core and a tapered fluid flow path wall in the vicinity of the sensor conduit input and output connections.

Abstract: A sensor measures an unknown pressure having to a sensitivity on the order of 1 micro-torr. The sensor includes two 10 micro-torr sensitivity capacitance manometers which each receive the unknown pressure. The capacitance manometers are positioned about a common axis around a common pressure chamber that receives the unknown pressure so that the flexible diaphragms of each of the capacitance manometers simultaneously deform either outwardly or inwardly from the common pressure chamber in response to changes in pressure. When a vibrational or gravitational force is applied to the sensor, one flexible diaphragm deforms outwardly away from the common pressure chamber and the other deforms inwardly towards the common pressure chamber. Hence, changes in pressure cause each of the capacitance manometers to produce a like change in their output signal; however, vibrational or gravitational forces produce an opposite change in their output signal.

Abstract: A fully sealing butterfly valve throttles flow rates through a flow channel and completely ceases flow. A throttle plate rotates into a close position and then moves axially to seat against a seal. The axial movement directly corresponds to rotation of an actuator shaft to improve valve control for the entire range of throttle plate movement from a full open position to a seal position. Additionally, the present butterfly valve employs a self-centering throttle plate adapted to float within the valve central bore. The throttle plate adjusts its positioning about an annular seal to achieve an effective seal entirely around its circumference.

Abstract: A interconnection system for coaxial fluid tubing includes zero-clearance connectors having a metallic innner gasket for sealing an inner passageway for a first fluid and having a elastomeric outer gasket for sealing an outer passageway for a second fluid. The elastomeric outer gasket forms a fluid-tight seal as the connectors are tightened. Further tightening of the connectors engages and seals the metallic inner gasket. Both straight tubing sections and elbows are constructed in a factory setting so that the completed sections can be assembled at a job site without cutting or welding.