Patents Assigned to UAB Nova Fabrica
  • ASSEMBLY FOR USE IN A VACUUM TREATMENT PROCESS
    Publication number: 20150194295
    Abstract: An assembly for use in a vacuum treatment process, the assembly including a process changer 1. Gas analysis apparatus to sample and analyse the gas composition within the chamber 1 is provided. The gas analysis apparatus includes a measuring apparatus 14 based either on a miniature mass spectrometer or on a miniature plasma source, which is located within an elongate housing 18. Part of the housing 18 is located within the process chamber 1 such that the gas is analysed within the chamber 1.
    Type: Application
    Filed: February 4, 2013
    Publication date: July 9, 2015
    Applicant: UAB Nova Fabrica
    Inventor: Martynas Audronis