Patents Assigned to UK ROBOTICS. CO., LTD.
  • Publication number: 20240312818
    Abstract: A semiconductor wafer transporting apparatus includes a fixed hand and a plurality of movable hands which support semiconductor wafers, a fixed frame of which one end is coupled to the fixed hand to support the fixed hand, a plurality of movable frames of which one ends are coupled to the movable hands to vertically move the movable hands, a pair of first sliders which are coupled to the other ends of a pair of movable frames among the movable frames and vertically move the pair of movable frames according to rotation of a first ball screw, and a pair of second sliders which are coupled to the other ends of another pair of movable frames among the movable frames and vertically move the another pair of movable frames according to rotation of a second ball screw.
    Type: Application
    Filed: December 1, 2021
    Publication date: September 19, 2024
    Applicant: UK ROBOTICS. CO., LTD.
    Inventor: Woo Jong YOO