Abstract: A gas-panel manifold for use in a gas-panel assembly is disclosed. A manifold in the assembly provides a plurality of support surfaces, each designed for supporting a gas-component thereon, and internal passageways disposed within the manifold body for connecting gas components, with such carried on the manifold, for gas flow through the manifold in a generally downstream direction. The adjacent support surfaces in the manifold are in different planes, representing different heights above the support.

Abstract: Modular components for use in a gas-panel assembly of the type having two or more gas-panel sticks mounted on a support, stick being composed of a manifold having a plurality of gas components mounted thereon, and internal fluid connections between individual components carried on each manifolds, are disclosed. The components include one or more modular blocks that can be removably placed within or adjacent an end of each manifold, an internal pipe module that provides an internal fluid passageway between one of the gas components carried on a manifold and a support on an adjacent modular block unit, and one or more external pipe modules that provide an external fluid passageway between surface ports formed in the modular block, for connecting adjacent manifolds in the gas assembly.

Abstract: The present invention provides a processing apparatus having multiple systems, and multiple components in each system. The apparatus includes a monitoring capability for monitoring the components and calculating a Health Index of each system, based on aggregate component performances of the components. The computer may initiate a trouble-shooting routine on components of a system if the Health Index of the system is below a preselected threshold value relative to a signature Health Index of the system. Also disclosed is a method for monitoring the performance characteristics of components in a multi-component chemical-delivery system.

Abstract: A gas-panel manifold for use in a gas-panel assembly mounted on a support is disclosed. The manifold includes (i) a plurality of two-port stations at which gas components, including one or more gas-valve components, can be mounted, (II) at least one station having a port for accommodating an overhead fluid connection, and (iii) internal fluid connections between individual stations in the manifold, for carrying a gas from one gas component mounted on the assembly to another, and for carrying gas from said one station to one of the two ports at a station which a valved gas component is to be mounted. The fluid connections have a cross-sectional area that is larger than can be accommodated by a three-port station of the type used for mounting a three-port valved gas component.

Abstract: A fluid manifold and components for constructing the fluid manifold having a plurality of separate fluid-flow pathways are disclosed. The manifold includes a plurality of pipe modules which form the fluid-flow pathways and a plurality of block modules which can be placed together in various configurations with the pipe modules to form the fluid manifold. The pipe modules have terminal collars or flanges by which they are supported within the block modules, and the block module construction allows modules to be removed and replaced without removal of adjacent block or pipe modules.

Abstract: A fluid manifold and components for constructing the fluid manifold having a plurality of separate fluid-flow pathways. The manifold comprises a plurality of pipe modules which form said fluid-flow pathways and a plurality of block modules which can be joined together in various configurations with the pipe modules to form the fluid manifold. The pipe modules each include an elongate pipe section and two or more connectors, each having a proximal end section joined in fluid communication with the elongate pipe section and a distal end section terminating at a support structure.