Patents Assigned to ULTRA CLEAN TECHNOLOGY, INC.
  • GAS-PANEL SYSTEM
    Publication number: 20090078324
    Abstract: The invention involves the introduction of a gas-flow restrictor and reservoir upstream of a mass flow controller (MFC) in a gas-panel stick. The restrictor and reservoir components function to smooth out pressure spikes in the gas line, thus preventing gas-flow irregularities that can occur in an MFC or pressure-insensitive MFC. The restrictor and reservoir components can be integrated into the MFC.
    Type: Application
    Filed: September 22, 2008
    Publication date: March 26, 2009
    Applicant: ULTRA CLEAN TECHNOLOGY, INC.
    Inventors: Hubert Dinh, Sowmya Krishnan, Bruce C. Wier, Mohamed Saleem