Abstract: The power supply apparatus for the electrostatic chuck of this invention has: DC power source units for applying DC voltage to electrodes of the electrostatic chuck; and an AC power source unit for causing AC current to flow through an electrostatic capacitance of the electrostatic chuck. Provided that: a circuit for charging an electrode, from DC power source unit, with chuck voltage in order to attract and hold in position the to-be-processed substrate with the electrostatic chuck, be defined as a first circuit and that; a circuit for clearing charges of the to-be-processed substrate be defined as a second circuit, the power supply apparatus further includes switching means for switching between the first circuit and the second circuit. The second circuit is provided with an AC power source unit and a voltmeter for measuring AC voltage.

Abstract: The power supply apparatus for the electrostatic chuck of this invention has: DC power source units for applying DC voltage to electrodes of the electrostatic chuck; and an AC power source unit for causing AC current to flow through an electrostatic capacitance of the electrostatic chuck. Provided that: a circuit for charging an electrode, from DC power source unit, with chuck voltage in order to attract and hold in position the to-be-processed substrate with the electrostatic chuck, be defined as a first circuit and that; a circuit for clearing charges of the to-be-processed substrate be defined as a second circuit, the power supply apparatus further includes switching means for switching between the first circuit and the second circuit. The second circuit is provided with an AC power source unit and a voltmeter for measuring AC voltage.

Abstract: The present invention provides a surface treatment method for an aluminum alloy and a surface treatment method for a magnesium alloy, which enable providing the surface of an aluminum alloy containing magnesium or the surface of a magnesium alloy with sufficient corrosion resistance to corrosive gases, while preventing the surface from scattering magnesium therefrom even when used in a vacuum at a temperature of not less than 300° C. In this method, a carbon fluoride compound is applied over the surface of the aluminum alloy containing magnesium or the surface of the magnesium alloy, followed by heating in an oxygen atmosphere, thereby forming a fluoride passivation film.

Abstract: The present invention provides a surface treatment method for an aluminum alloy and a surface treatment method for a magnesium alloy, which enable providing the surface of an aluminum alloy containing magnesium or the surface of a magnesium alloy with sufficient corrosion resistance to corrosive gases, while preventing the surface from scattering magnesium therefrom even when used in a vacuum at a temperature of not less than 300° C. In this method, a carbon fluoride compound is applied over the surface of the aluminum alloy containing magnesium or the surface of the magnesium alloy, followed by heating in an oxygen atmosphere, thereby forming a fluoride passivation film.