Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate with high homogeneity in a defined area, e. g. on a semiconductor wafer or a data storage media, by conditioning the liquid on the substrate thermally in a first step and exposing it to UV radiation in two further steps, locally specific before or during the spin coating process.

Abstract: A vacuum treatment system (1) for treating workpieces has a treatment chamber (10) that can be evacuated and in which a low-volt arc-discharge device is placed, with at least one locking loading/unloading aperture and at least one coating source placed on one side wall of the treatment chamber. It also has a device for producing a magnetic field to create a remote magnetic field and at least one workpiece holder to hold workpieces. A target-shutter arrangement (8, 8?) is designed so that when uncovered, the distance between the shutter (8) and the target (12) is less than 35 mm, thus allowing ignition and operation of a magnetron or cathode spark discharge behind the target, but preventing ignition of auxiliary plasma when the target (8) is turned off.

Abstract: A method for manufacturing structural elements provides a first part with a surface that is substantially copper and a second part with a surface of a metal. The surface of the first part is coated with a hard layer which is stable at a temperature of at least 80° C. and which, at this temperature, forms an oxygen diffusion barrier when exposed to ambient. The layer has a barrier effect similar to that of an aluminum oxide layer formed in a standard environment on aluminum. The surfaces are connected to each other by bonding with heating to at least 80° C.

Abstract: A method and apparatus for producing an information carrier which has at least two solid material interfaces at which information is, or may be applied and where the information is stored by local modulation of at least one characteristic of the solid material. Reflection of electromagnetic radiation at the interface depends on this characteristic. The method and apparatus applies at least one intermediate layer between the two solid material interfaces. The intermediate layer transmits the radiation and is at least predominantly made of either SixCy or SivNw, or both.

Abstract: A first substrate (11a) is positioned on a support surface (7) in a vacuum chamber with an upward-facing first bonding surface (12a) spin-coated with adhesive while a second substrate (11b) is held with downward-facing second bonding surface (12b) to a cover (3) by suction. While the vacuum chamber is being evacuated to a pressure of between 0.1 mbar and 2 mbar, a support pin (9) is extended through central openings (14a, 14b) of the substrates (11a, 11b) and then retracted with the second substrate (11b) released from the cover (3) and carried by radially extended balls (10). The support pin (9) is lowered to a position where the balls (10), acting against the first bonding surface (12a), deform the first substrate (11a). The first bonding surface (12a) being therefore slightly concave, the first and second bonding surfaces (12a, 12b) only touch close to their circumferences.

Abstract: A method for manufacturing an optical waveguide includes shaping a substrate of organic material, applying at least one intermediate layer by a first vacuum coating process onto the substrate and applying a waveguide layer by means of a second vacuum coated process onto the intermediate layer. The at least one intermediate layer is applied so that only a negligible part of light energy reaches an interface surface between the intermediate layer and the substrate.

Abstract: Method for producing cutting tools provides a first hard material coating on a first region of a tool base body containing at least one cutting edge, using a plasma vacuum coating process. A second hard material coating is provided on a second region which is adjacent the first, also via plasma vacuum coating process. Hard material for the coatings is a carbide, oxide, oxicarbide, nitride, nitrocarbide, oxinitride or nitrooxicarbide of at least two of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al. The first coating has a content of at least two of the metal elements which is at most 2 at % different from the content of the two metal elements in the second coating if the tool is for higher adhesive strength than hardness. The first coating has a content of the two metal elements that is different from the content of the two metal elements of the second coating by more than 2 at % if the tool is for higher hardness than high adhesive strength.

Abstract: A method of manufacturing a coated workpiece utilizes a target made of an alloy which is substantially a one phase. Coating is achieved by cathodic arc evaporation of the target in an oxygen atmosphere.

Abstract: A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring element that generates a second pressure signal has a heating element connected to the baseplate adjacent the support plate at a location opposite from the membrane for protecting the membrane from thermal effects. The method uses the sensor apparatus to generate an output signal representing a measured result when the measured result is above a transition value, on the basis of the first pressure signal and, when the pressure falls below a threshold value, any offset of the first pressure signal is compensated in such a way that determination of the output signal on the basis of the first pressure signal leads to the same result as determination of the output signal on the basis of the second pressure signal.

Abstract: A vacuum treatment workpiece support and method for a vacuum treatment apparatus, uses a sun system that is rotatable with respect to the apparatus about a sun system axle. The sun system is coupled to an apparatus-side drive. At least one planet system supported on the sun system, is rotatable about a planet axle and is provided with a driving coupling with respect to the apparatus. At least one moon system is supported on the planet system, and is rotatable about a moon axle with a driving connection to the sun system. A receiver for at least one workpiece is provided on the moon system. The driving connection is established, at least during operation of the apparatus, in an uninterrupted manner, between the sun system and the moon system.

Abstract: Method for manufacturing a selective light splitter and recombining device that divides white light into red, green and blue light and recombines red, green and blue light independently of polarization, provides two coating systems, each reflecting and transmitting color-selectivity. A transparent base body is embedded in or is on the coating systems and at least one of the coating systems has a layer of a material with lower refractive index and at least one of a material with higher refractive index. The lower refractive index is selected so that 1.7≦NLS≦2.1 and the refractive index of the transparent base body is selected so that 1.52≧NK≧1. The method also includes determining an emergent face for the red, green and blue light, and tilting one emergent face such that it forms an angle p deviating from zero by more than is caused by fabrication tolerances for which &phgr;≦5°.

Abstract: A HF plasma treatment chamber is provided for at least one dielectric substrate. A HF generator for the plasma discharge, a coupling-in arrangement connected with the generating for supplying HF energy into the chamber, and at least one substrate receiving device defining a receiving surface for the substrate comprise the chamber. The generator is operatively connected with the chamber by way of a dielectric layer. The chamber is a coating chamber and, for the coating of a metallic surface of at least one dielectric substrate and/or the coating of at least one dielectric substrate with a metallic layer. The receiving device as well as the HF connection to the generator are arranged such that the HF discharge current circuit is connected with the chamber by way of the dielectric substrate as the capacitive coupling-in element.