Abstract: A method for producing a layer of a metal oxide with optical losses of 15 dB/cm, at most, for light with a wavelength of 633 nm, includes depositing the layer using magnetic field enhanced reactive DC-sputtering, from a metallic target.

Abstract: A method uses a treatment process for surfaces which subsequently are to be connected by bonding, gluing or molding. The surfaces are exposed to an atmosphere with activated hydrogen. The connection is made a process step for eliminating the conservation treatment. The surfaces can be subjected to a plasma discharge in an atmosphere containing hydrogen. The plasma discharge is operated by a cathode/anode path as a DC discharge, and using a thermionic cathode as the cathode. The workpiece to be stored in air comprises a connection, which by gluing, bonding or molding, is subjectable to substantially higher stress than an identical workpiece which is stored in an identical manner, this being determinable by essentially identical Auger diagrams.

Abstract: A plasma reactor has a reactor vessel and a pair of electrodes in the form of spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space. At least one of the metallic surfaces is the surface of a metallic plate having a plurality of gas feed openings extending through the metallic surface towards said discharge space and from a distribution chamber extending along the plate opposite the discharge space. The distribution chamber has a wall opposite and distant from the plate and includes a gas inlet arrangement with a plurality of gas inlet openings distributed along the wall and connected to one or more gas feed lines to the reactor. A gas flow resistant coefficient between the one or more gas feed lines and at least a predominant portion of the connected inlet openings are at least substantially equal.

Abstract: An optical device has a base body with a surface, a first optically effective, multilayer system in the base body, terminating at an intersection, and a second optically effective, multilayer system. The second system has a layer along the base body surface, spanning the intersection. The surface of the base body, including the intersection, are jointly treated by at least one of: milling, grinding, polishing, and lapping. A further base body with a further surface and a third optically effective system terminating at a further intersection area at the further surface also has a further layer between the second optically effective multilayer system and the further surface.

Abstract: A vacuum treatment system has an outer housing which defines a substantially cylindrical inner wall around an axis. At least two openings are provided for treating or conveying-through a respective workpiece arranged along at least one great circle of the cylindrical inner wall. One treatment, conveying or lock chamber respectively, is connected with the at least two openings. An inner housing defines a cylindrical outer wall and, together with the substantially cylindrical inner wall, forms a substantially cylindrical ring gap. A workpiece carrier carousel is rotationally drivable about the axis in the ring gap. A feed device comprising driving devices is movable in a radially driven manner on the inner housing and is aligned with the at least two openings. The driving devices act into the ring gap, and each of the driving devices has a separate drive.

Abstract: A method of manufacturing an object in a vacuum treatment apparatus having a vacuum recipient for containing an atmosphere, includes the steps of supporting a substrate on a work piece carrier arrangement in the recipient and treating the substrate to manufacture the object in the vacuum recipient. The treating process includes generating electrical charge carriers in the atmosphere and in the recipient which are of the type that form electrically insulating material and providing at least two electroconductive surfaces in the recipient. Power, such as a DC signal, is supplied to at least one of the electroconductive surfaces so that at least one of the electroconductive surfaces receives the electrically insulating material for covering at least part of that electroconductive surface. This causes electrical isolation of that electroconductive surface which leads to arcing and damage to the object.

Abstract: Disclosed is a workpiece conveyor and delivery device for a vacuum processing plant. Workpieces are delivered from one device to another, both devices being located opposite each other and moving in relation to each other. A controllable magnet arrangement is provided on one of the devices. A moveable armature element acts as a holding device for the workpiece on one of the two devices which move in relation to each other, namely the device provided with the magnet arrangement. Magnet arrangement is driven to activate the holding device which can be deactivated for delivery of workpiece.

Abstract: A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring element that generates a second pressure signal has a heating element connected to the baseplate adjacent the support plate at a location opposite from the membrane for protecting the membrane from thermal effects. The method uses the sensor apparatus to generate an output signal representing a measured result when the measured result is above a transition value, on the basis of the first pressure signal and, when the pressure falls below a threshold value, any offset of the first pressure signal is compensated in such a way that determination of the output signal on the basis of the first pressure signal leads to the same result as determination of the output signal on the basis of the second pressure signal.

Abstract: Method for manufacturing a selective light splitter and recombining device that divides white light into red, green and blue light and recombines red, green and blue light independently of polarization, provides two coating systems, each reflecting and transmitting color-selectivity. A transparent base body is embedded in or is on the coating systems and at least one of the coating systems has a layer of a material with lower refractive index and at least one of a material with higher refractive index. The lower refractive index is selected so that 1.7≦NLS≦2.1 and the refractive index of the transparent base body is selected so that 1.52≧NK≧1. The method also includes determining an emergent face for the red, green and blue light, and tilting one emergent face such that it forms an angle &phgr; deviating from zero by more than is caused by fabrication tolerances for which &phgr;≦5°.

Abstract: An Rf plasma enhanced chemical vapor deposition (PECVD) coating chamber for coating a planar dielectric substrate with a metallic layer or a plane dielectric substrate covered with a metallic layer. A reaction space is provided within the chamber and is confined between at least a flat metallic first electrode surface of a first electrode, and a second electrode surface. A substrate holder arrangement holds a substrate flat onto the first electrode surface and completely covers the first electrode with the first electrode surface towards the reaction space. The first and second electrode surface are connected to a source of Rf power. A dielectric substrate is coated with a metallic layer or a dielectric substrate covered with a metallic layer by an Rf-PECVD coating process. The substrate is deposited on a first electrode surface within a coating chamber, thereby completely covering the electrode surface by the dielectric substrate.

Abstract: A device for connecting two bodies, especially a quartz body and a metallic body, which assures with few and simply formed components a high sealing ability at high temperature differences and at very low pressures and makes possible an easy assembly and disassembly. The device for the vacuum-tight connecting of two bodies of different materials, each of which has an essentially tubular end section (20, 30) and in the connected state of which the tubular end section (30) of the first body surrounds at least partially the end section (20) of the second body, includes an intermediate conduit (13) for intermediate suction removal of gases and is formed between the tubular end sections (20, 30) of the bodies with two seals (100, 150) which seal off the intermediate conduit (130).

Abstract: A method of manufacturing workpieces, includes loading the workpieces into a treatment facility, surface treating the workpieces in at least one vacuum station of the facility grouped as a station batch and controlling at least the timing of the process by a freely programmable process controller unit. At least two stations operating each on workpiece batches can be grouped as respective station batches and be different with respect to number of workpieces. The workpieces can be transported to and from the grouped stations. An embodiment of vacuum treatment system for such a process includes at least one vacuum treatment station for workpieces grouped as a station batch. A transport system supplies the vacuum station with workpieces. A process controller unit has an output operationally connected to a drive arrangement for the transport system. The unit controls operating timing of the treatment system and is freely programmable.

Abstract: A sputtering target is made of the alloy AgxMayMbz or CuxMayMbz where x>50 at % and whereby Ma stands for a second metal and Mb stands for a third metal. A method for manufacturing data storage disks using the target includes the steps of providing a substrate, providing a spacer layer of a material which is transmitting light of a selected wavelength upon a surface of the substrate, applying between the spacer layer and the substrate a first layer of a first metal alloy, providing upon the spacer layer a second layer of a second metal alloy and depositing one of the first and second metal alloys of the first and second layers respectively so that the one is semi-transparent with respect to the light. In the first and second metal alloys, at least one same metal with a fraction in each of the alloys of more than 50 at % is provided and when either of the alloys contain gold, the amount of gold is 0 to 50 at %.

Abstract: A process is provided for producing coated synthetic bodies during which, before the coating, the surface to be coated is subjected to a pretreatment in an excited gas atmosphere. The surface is then coated. The gas atmosphere is predominantly formed of a noble gas and nitrogen and/or hydrogen, and the ionic energy in the gas atmosphere and in the are of the surface to be coated is not more than 50 eV. The ionic energy is selected to be not more than 20 eV, preferable not more than 10 eV. The gas atmosphere is excited by means of a plasma discharge or by means of UV radiation.

Abstract: At least one chamber is provided for transport of workpieces such as storage disks, at least at times, into the vacuum atmosphere, during their manufacturing and comprises at least two exterior openings for the guiding-through of a workpiece. A majority of workpiece-receiving devices can be rotated jointly about an axis. At least one transport element is provided and is aligned with an opening. The transport element is disposed in the chamber independently of the rotatable workpiece-receiving devices and can be moved out and back in a radially controlled manner in at least one component, and engages on a workpiece in the opening area. A transport method for workpieces in an evacuatable chamber provides that at least two workpieces are rotated about a center in a plane of rotation and are displaced individually in a radial manner with respect to the center of rotation at least in one movement component.

Abstract: In order to simplify its production, a target consists of a target plate (1) and a retaining ring (2) which is mounted thereon and can be inserted in the manner of a bayonet lock into a receiving orifice of a holding device (4). A downward-facing stop (8) on the inside of the retaining ring (2), whose upper surface is flush with that of the target plate (1), cooperates with an opposite stop (7) on the latter, which is produced in a simple manner by producing an all-round step, for example by turning. The lower surface of the target plate (1) projects beyond that of the retaining ring (2), so that a metal foil (9) is pressed against its lower surface under the action of a cooling liquid under pressure, and, via the opposite stop (7) and the stop (8), presses upward-facing fastening cheeks (5) of the retaining ring (2) against retaining projections (6) of the holding device (4).

Abstract: An apparatus for plasma treating workpieces in vacuum comprises a stack of plasma chambers (20) . Handling of workpieces to and from the plasma chambers of the stack is performed in parallelism by one handling device and through lateral handling openings of the plasma chambers. The handling device is rotatable around an axis parallel to the handling openings of the plasma chambers and comprises transport means simultaneously movable radially with respect to the axis of rotation towards and from the handling openings.

Abstract: An optical data storage disk has a disk surface and a thickness and includes, in a direction from the disk surface and toward the thickness, at least two spaced-apart interfaces which are each embossed with stored information. An innermost one of the interfaces from the disk surface has a first layer which is reflective for light of a selected wavelength and at an incident angle <90°. The other has a second layer which is partially reflective and partially transmitting for light of the same selected wavelength and incident angle. All remaining material of the disk in the thickness from the disk surface to the innermost interface, substantially transmits light of the selected wavelength. The first and second layers are made of AgxMayMbz or CuxMayMbz, where x>50 at % and Ag or Cu are a first metal, Ma is a second metal and Mb is a third metal.

Abstract: A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.

Abstract: Two mutually opposite sputtering surfaces of at least one target are self-enclosed such that a closed loop gap, and consequently a closed loop plasma discharge space, is formed. A gas flow is created between the sputtering surface and directed against workpieces. No gap ends exist on the closed loop gap so that electrons that move along and within the plasma loop can recirculate until most of their energy has been transferred through impacts to the gas particles.