Patents Assigned to Unaxis Trading AG
  • Method of producing flat panels
    Patent number: 6284106
    Abstract: A method for producing flat panels for TFT or plasma display applications includes forming a sputter source within a sputter coating chamber, the source having at least two electrically mutually isolated stationery bar-shaped target arrangements. A controlled magnet arrangement provided under each target with a time-varying magnetron field.
    Type: Grant
    Filed: June 5, 2000
    Date of Patent: September 4, 2001
    Assignee: Unaxis Trading AG
    Inventors: Walter Haag, Pius Grunenfelder, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer