Abstract: Method and apparatus for transferring semi-conductor discs to and from a slab-form quartz boat which apparatus includes a carrier having a pair of hingedly attached shells having a plurality of opposed slots; the method including the receiving and discharge of discs by and from the slots in the carrier, into and from cooperative slots in the said quartz boat by the pivotal opening and closing of the shells of the carrier.
Type:
Grant
Filed:
September 15, 1975
Date of Patent:
May 17, 1977
Assignee:
United States Fused Quartz Company, Inc.