Abstract: An in-situ plasma cleaning device (PCD) performs an atomic surface cleaning process to remove contaminants and/or to modify the cylindrical surfaces of both the target and substrate. The atomic cleaning process utilizes a plasma generated locally within the in-situ plasma cleaning device with suitable properties to clean both the target and substrate cylindrical surfaces either concurrently or separately. Moreover, the in-situ plasma cleaning device is designed to traverse the length of the target and the substrate cylindrical surfaces during the cleaning process.
Type:
Grant
Filed:
September 30, 2003
Date of Patent:
January 22, 2008
Assignee:
United States of America as represented by the Secrertary of the Army
Inventors:
Michael J. Audino, Michael Cipollo, David Glocker, Kevin Miner, Patrick Vottis