Patents Assigned to Univerity of South Florida
  • Devices having nanoscale structures and methods for making same
    Patent number: 9184308
    Abstract: In one embodiment, devices, such as metal-insulator-metal tunneling diodes, are fabricated by forming a cavity in a substrate having a top surface, conformally depositing a thin film of material in the cavity so as to form a thin layer of material on walls of the cavity, and depositing a layer of material to fill the cavity, wherein a top edge of the thin film is exposed and is flush with the top surface of the substrate.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: November 10, 2015
    Assignee: Univerity of South Florida
    Inventors: I-Tsang Wu, Jing Wang