Abstract: The invention relates to a method of determining material properties of a contact formed between a measurement tip of a microscopic probe and a sample surface of a sample material. According to the method, a distance modulation is applied for modulating a distance between a support of the microscopic probe end the sample surface in a direction essentially normal to the sample surface and wherein a normal force signal indicative of a normal force is measured and demodulated. In the method it is proposed that the material properties be determined using measurement data comprised in the demodulated normal force signal and related to a (concave) buckling deformation of the microscopic probe relative to and away from the sample surface.