Abstract: A scanning near-field optical microscope detects the evanescent field formed about an illuminated sample 14 via an interaction between the field and a local probe 20.The probe 20 is scanned across the sample surface in order to collect a complete image as a succession of scan lines. In the microscope of this invention, image collection is more rapidly performed by translating the probe 20 whilst it is oscillated at or near its resonance frequency. In this way a series of scan lines covering an area of the sample surface are rapidly collected, the length of each scan line being determined by oscillation amplitude.

Abstract: A scanning probe microscope detects or induces changes in a probe-sample interaction. In imaging mode, the probe 54 is brought into a contact distance of the sample 12 and the strength of the interaction measured as the probe 54 and sample surface are scanned relative to each other. Image collection is rapidly performed by carrying out a relative translation of the sample 12 and probe 54 whilst one or other is oscillated at or near its resonant frequency. In a preferred embodiment the interaction is monitored by means of capacitance developed at an interface between a metallic probe and the sample. In lithographic mode, an atomic force microscope is adapted to write information to a sample surface.

Abstract: A scanning near-field optical microscope detects the evanescent field formed about an illuminated sample 14 via an interaction between the field and a local probe 20. The probe 20 is scanned across the sample surface in order to collect a complete image as a succession of scan lines. In the microscope of this invention, image collection is more rapidly performed by translating the probe 20 whilst it is oscillated at or near its resonance frequency. In this way a series of scan lines covering an area of the sample surface are rapidly collected, the length of each scan line being determined by oscillation amplitude.

Abstract: A scanning probe microscope detects or induces changes in a probe-sample interaction. In imaging mode, the probe 54 is brought into a contact distance of the sample 12 and the strength of the interaction measured as the probe 54 and sample surface are scanned relative to each other. Image collection is rapidly performed by carrying out a relative translation of the sample 12 and probe 54 whilst one or other is oscillated at or near its resonant frequency. In a preferred embodiment the interaction is monitored by means of capacitance developed at an interface between a metallic probe and the sample. In lithographic mode, an atomic force microscope is adapted to write information to a sample surface.