Abstract: A method of controlling a reactive sputter deposition process includes selecting a control process parameter for a target material and a reactive gas, the target material included in a target acting as a cathode, the reactive sputter deposition process involving forming a compound from a reaction between the target material and reactive gas species associated with the reactive gas in a vacuum chamber; establishing an operation regime for the reactive sputter deposition process for a given target power; and performing, based on the selected control process parameter and the established operation regime, the reactive sputter deposition process in a transition region between a metallic mode and a covered mode through a controlled pulsed reactive gas flow rate into the vacuum chamber, such that a stabilized reactive deposition of the compound on a substrate is achieved, the deposited compound on the substrate comprising a dielectric stoichiometric film.

Abstract: A digital generator of phase shift modulation receives two binary coded numbers (F) and (P), that represent a requested frequency value and a requested phase value, respectively, and generates two pairs of phase-shifted signals a, b and c, d. One pair of the phase-shifted signals is intended to control one half bridge of a full-bridge converter, and the second pair is intended to control the other half bridge. Signal b is complementary to signal a having a 50% duty cycle with addition of dead times created by a first delay line (5). Signals c and d have the same parameters as signals a and b, with the exception that dead times are created by a second delay line (6). The frequency of generated signals is proportional to the requested frequency value (F) and the phase shift between pairs of signals is proportional to the requested phase value (P).

Abstract: A digital generator of phase shift modulation receives two binary coded numbers (F) and (P), that represent a requested frequency value and a requested phase value, respectively, and generates two pairs of phase-shifted signals a, b and c, d. One pair of the phase-shifted signals is intended to control one half bridge of a full-bridge converter, and the second pair is intended to control the other half bridge. Signal b is complementary to signal a having a 50% duty cycle with addition of dead times created by a first delay line (5). Signals c and d have the same parameters as signals a and b, with the exception that dead times are created by a second delay line (6). The frequency of generated signals is proportional to the requested frequency value (F) and the phase shift between pairs of signals is proportional to the requested phase value (P).