Abstract: A device for compressing and feeding to a microturbine power generator a high humidity fuel gas such as biogas, which cools the high humidity fuel gas condensed by the compressor using an air-cooling type fin-tube radiator, condenses and liquefies the moisture, then removes it by a moisture-removing means such as a gas/liquid separator or adsorption type moisture-removing tank, which requires only enough power to drive a cooling fan, which heats the fuel gas from which the majority of the moisture has been removed in a heat exchanger utilizing the heat of compression generated in the compressor, then feeds it to piping leading to the microturbine power generator, and which is free from the residual moisture liquefying and freezing even if the fuel gas is cooled in the piping.

Abstract: A device for compressing and feeding to a microturbine power generator a high humidity fuel gas such as biogas, which cools the high humidity fuel gas condensed by the compressor using an air-cooling type fin-tube radiator, condenses and liquefies the moisture, then removes it by a moisture-removing means such as a gas/liquid separator or adsorption type moisture-removing tank, which requires only enough power to drive a cooling fan, which heats the fuel gas from which the majority of the moisture has been removed in a heat exchanger utilizing the heat of compression generated in the compressor, then feeds it to piping leading to the microturbine power generator, and which is free from the residual moisture liquefying and freezing even if the fuel gas is cooled in the piping.

Abstract: In a multiple-stage rotary type vacuum pump, gas is compressed in one pump section and passes through a communication path into the next pump section for successive compression. The mechanical seals 51, 52 are arranged in the sides of the housing of the bearings 351, 352. An oil pump 42 for lubrication oil for the bearings is arranged for supplying lubrication oil to the bearings. The oil pump is communicated with the oil vessel 40. The discharge opening of the oil pump is communicated with oil supply pipes 311, 312 communicated with the supporting bodies 341, 342 of the mechanical seals. A return oil piping 43 is arranged for returning the lubrication oil.

Abstract: A vacuum pump with dust collecting function is proposed to deal with the case where dust produced by a process of productions by reaction in a processing vessel under vacuum may to enter a vacuum pump. During evacuation of a processing vessel by a vacuum pump, an auxiliary dust collecting path is closed by a shut-off valve and evacuation through a main exhaust path is carried out. During a period in which evacuation by the vacuum pump is not necessary, the auxiliary dust collecting path is open to form a circulation path with the main exhaust path to carry out collection of the dust by a dust separator.

Abstract: A multi-section Roots vacuum pump of the reverse-flow cooling type having a plurality of pump sections each having rotors fixed to two common shafts. The pump includes a housing in each of the pump sections having an inlet and an outlet for a gas to be pumped and enclosing the rotors, a peripheral gas passages arranged around the housing, and a peripheral coolant water passages arraged around the peripheral gas passages. The gas flowing through the inlet into the housing and delivered through the outlet is supplied to the peripheral gas passages to be cooled there, and at least a portion of the cooled gas is returned into the housing. The remaining portions of the gas which are not returned into the housing in the pump sections except for the last pump section are supplied to the inlet of the next pump section through the peripheral gas passage.

Abstract: A multi-section vacuum pump includes a pump portion, an intermediate shaft portion provided between the pump portion and an external drive shaft, a drive shaft portion including a drive shaft having a drive gear for driving the intermediate shaft portion and a shaft seal structure on the drive shaft, and a gear box accommodating the timing gear set, the intermediate gear, and the drive gear and allowing the lubricating oil to be reserved at the bottom thereof. The drive shaft portion includes, at the bottom of the drive shaft in the shaft seal structure, oil supply for supplying lubricating oil to an oil reservoir having an oil overflow opening communicating with the gear box, a lubricating oil path for introducing the lubricating oil reservoir being provided having an oil overflow opening communicating with the gear box, a lubricating oil path for introducing the lubrication oil to the oil reservoir being provided inside the drive shaft.

Abstract: A multi-section Roots vacuum pump of the reverse flow cooling type with internal flow division arrangement includes a sequence of pump sections, casings for the pump sections including housings for accommodating pairs of rotor therein, inlet passages and outlet passages connected to the casing for pump sections, upper peripheral gas passages connected to the inlet passage formed around an upper portion of the housing, lower peripheral gas passages connected to a supply inlet of reverse flow cooling gas formed around a lower portion of the housing, partition walls between the upper and lower peripheral gas passages, and inter-section walls for separating adjacent pump sections.