Abstract: A spatial light modulator cell and arrays of spatial light modulator cells are disclosed. The spatial light modulator cells can comprise a phase change material (PCM) having a first side and a second side; an optical reflector configured to reflect an optical beam passing from the first side to the second side; and a PCM heater thermal conductively coupled to the PCM, wherein thermal modulation of the PCM modulates a phase of the PCM which varies light transmission through the PCM. Methods of making spatial light modulator cells and arrays are also disclosed.
Type:
Grant
Filed:
October 24, 2019
Date of Patent:
April 26, 2022
Assignee:
URL Laboratories, LLC
Inventors:
Jeong-Sun Moon, Adour V. Kabakian, David H. Chow, Richard M. Kremer