Patents Assigned to Ushio Research Institute of Technology Inc.
  • Gas laser device
    Patent number: 6804286
    Abstract: There is provided an excimer laser device capable of producing a stable oscillation even at a high repetition rate of 4 kHz. This gas laser device is comprised of a laser chamber having laser gas filled therein; a pair of main discharge electrodes arranged in the laser chamber; a cross-flow fan for circulating the laser gas within the laser chamber at least between the main discharge electrodes; and a diameter of the cross-flow fan is 150 mm or less, its peripheral speed being 25.0 m/s or more.
    Type: Grant
    Filed: February 8, 2001
    Date of Patent: October 12, 2004
    Assignee: Ushio Research Institute of Technology Inc.
    Inventor: Tatushi Igarashi