Patents Assigned to Usho Denki
  • Patent number: 4882263
    Abstract: Ultraviolet radiation process applies to manufacture to semiconductor devices in order to enhance the thermal stability of the developed positive photoresist film on semiconductor's wafers.A method, in ultraviolet radiation process, and an apparatus enabling the high-speed and effective treatmnent of the positive photoresist employing ultraviolet irradiation by preventing the deformation of the positive photoresist which is caused by the light radiated form the microwave-excited electrodeless discharge lamp. These method and apparatus employ ultraviolet irradiation, in which ultraviolet rays are applied to the developed positive photoresist image placed under lower or pressure than 1 atmospheric pressure, using a means to intercept or reduce selectively all or part of the wavelengths in the spectral response region of the positive photoresist out of radiant lights obtained from the microwave-excited electrodeless discharge lamp.
    Type: Grant
    Filed: January 22, 1988
    Date of Patent: November 21, 1989
    Assignee: Usho Denki
    Inventors: Shinji Suzuki, Tetsuji Arai, Kazuyoshi Ueki, Yoshiki Mimura, Hiroko Suzuki